Hostname: page-component-586b7cd67f-2brh9 Total loading time: 0 Render date: 2024-11-29T08:17:20.344Z Has data issue: false hasContentIssue false
  • English
  • Français

Polariton-enhanced near field lithography and imaging with infrared light

Published online by Cambridge University Press:  15 March 2011

Gennady Shvets  and
Yaroslav A. Urzhumov
Gennady Shvets
Affiliation:
The University of Texas at Austin, Department of Physics, Austin TX 78712, USA
Yaroslav A. Urzhumov
Affiliation:
The University of Texas at Austin, Department of Physics, Austin TX 78712, USA
Get access

Abstract

A novel approach to making a material with negative index of refraction in the infrared frequency band is described. Materials with negative dielectric permittivity ε are utilized in this approach. Those could be either plasmonic (metals) or polaritonic (semiconductors) in nature. A sub-wavelength plasmonic crystal (SPC), with the period much smaller than the wavelength of light, consisting of nearly-touching metallic cylinders is shown to support waves with negative group velocity. The usage of such waves for sub-wavelength resolution imaging is demonstrated in a numerical double-slit experiment. Another application of the negative-epsilon materials is laser-driven near field nanolithography. Any plasmonic or polaritonic material with nega- tive ε = –εd sandwiched between dielectric layers with εd > 0 can be used to significantly decrease the feature size. It is shown that a thin slab of SiC is capable of focusing the mid- IR radiation of a CO2 laser to several hundred nanometers, thus paving the way for a new nano-lithographic technique: Phonon Enhanced Near Field Lithography in Infrared (PENFIL). Although an essentially near-field effect, this resolution enhancement can be quantified using far-field measurements. Numerical simulations supporting such experiments are presented.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 820: Symposia O/R – Nanoengineered Assemblies and Advanced Micro/Nanosystems , 2004 , R1.2
Copyright
Copyright © Materials Research Society 2004

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Born, M. and Wolf, E., Principles of Optics, Pergamon Press, Oxford, Sixth Edition, 1980.Google Scholar
2. Mansfield, S. M. and Kino, G. S. Appl. Phys. Lett. 57, p. 2615, 1990.Google Scholar
3. Pendry, J. B., “Negative refraction makes a perfect lens,” Phys. Rev. Lett. 85–88, pp. 3966–3969, 2000.Google Scholar
4. Smith, D. R., Padilla, W. J., Vier, D. C., Nemat-Nasser, S. C., and Schultz, S. Phys. Rev. Lett. 84, p. 4184, 2000.Google Scholar
5. Shen, J. T. and Platzman, P. M., “Near field imaging with negative dielectric constant lenses,” Appl. Phys. Lett. 80, p. 3826, 2002.Google Scholar
6. Fang, N., Liu, Z., Yen, T. J., and Zhang, X., “Regenerating evanescent waves from a silver superlens,” Opt. Exp. 11, p. 682, 2003.Google Scholar
7. Shvets, G., “Applications of surface plasmon and phonon polaritons to developing left-handed materials and nano-lithography,” in Proceedings of SPIE, Plasmonics: Metallic Nanostructures and Their Optical Properties, 5221, p. 124, 2003.Google Scholar
8. Jackson, J. B., Westcott, S. L., Hirsch, L. R., West, J. L., and Halas, N. J. Appl. Phys. Lett. 82, p. 257, 2003.Google Scholar
9. Bergman, D. J. and Stroud, D. Solid State Physics 46, p. 147, 1992.Google Scholar
10. Stockman, M. I., Faleev, S. V., and Bergman, D. J. Phys. Rev. Lett. 87, p. 167401, 2001.Google Scholar
11. O'Brien, S. and Pendry, J. B. Journ. Phys. Cond. Matt. 14, p. 4035, 2002.Google Scholar
12. Lyubarskii, G. Y., Application of Group Theory in Physics, Pergamon Press, New York, 1960.Google Scholar
13. Pendry, J. B., Holden, A. J., Robbins, D. J., and Stewart, W. J., “Magnetism from conductors and enhanced nonlinear phenomena,” IEEE Trans. Microwave Theory Tech. 47, p. 2075, 1999.Google Scholar
14. Pendry, J. B. Phys. Rev. Lett. 85, p. 3966, 2000.Google Scholar
15. Johnson, P. B. and Christy, R. W. Phys. Rev. B 6, p. 4370, 1972.Google Scholar
16. Matthias, S., Nielsch, J. S. K., Muller, F., Wehrspohn, R. B., and Gosele, U. Adv. Materials 14, p. 1618, 2002.Google Scholar
17. Fang, N. and Zhang, X., “Imaging properties of a metamaterial superlens,” Appl. Phys. Lett. 82, p. 161, 2003.Google Scholar
18. Palik, E. D., Handbook of optical constants of solids, Academic Press, Orlando, 1985.Google Scholar
19. Merlin, R., “Analytical solution of the almost-perfect-lens problem,” Appl. Phys. Lett. 84, p. 1290, 2004.Google Scholar