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Plasma Enhanced Liquid Source-Cvd Of Ta2O5 using penta Ethoxy tantalum source and its characteristics

Published online by Cambridge University Press:  15 February 2011

P. A. Murawala ,
M. Sawai ,
T. Tatsuta ,
O. Tsuji ,
Sz. Fujita  and
Sg. Fujita
P. A. Murawala
Affiliation:
Research & Development Center, Samco International Incorporated, 33, ‘Tanaanamiya-Cho, Takeda, Fushimi-ku, Kyoto 612, Japan
M. Sawai
Affiliation:
Research & Development Center, Samco International Incorporated, 33, ‘Tanaanamiya-Cho, Takeda, Fushimi-ku, Kyoto 612, Japan
T. Tatsuta
Affiliation:
Research & Development Center, Samco International Incorporated, 33, ‘Tanaanamiya-Cho, Takeda, Fushimi-ku, Kyoto 612, Japan
O. Tsuji
Affiliation:
Research & Development Center, Samco International Incorporated, 33, ‘Tanaanamiya-Cho, Takeda, Fushimi-ku, Kyoto 612, Japan
Sz. Fujita
Affiliation:
Department. of Electrical Engineering, Kyoto University, Kyoto 606, Japan
Sg. Fujita
Affiliation:
Department. of Electrical Engineering, Kyoto University, Kyoto 606, Japan
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Abstract

We rerxprt on plasma enhanced, liquid source, chemical vapor deposition (LS-CVD) of tantalunm penta oxide (Ta2 O5) material using a penta ethoxy tantalum [Ta(OC2H5)5] liquid source. We have investigated several basic plasma deposition conditions such as - dependence of deposition rate and refractive index on the source tank temperature, carrier gas N2 flow rate, reactive gas O2 flow rate anid substrate temperature. Structural properties investigated by θ-2θ x-ray measurements showed amorphous nature of the films and Auger electron spectrosopy indicated carbon-contamination free growth of Ta2O5 films having proper stoichiometry (Ta/O = 0.4). In addition to this we have also performed electrical measurements on Au/Ta2O5 /Si MOS structure which exhibit very well defined C-V characteristics with flat band voltage as tow as +0.3V, low leakage current and high breakdown voltages. As a hitherto unreported step in Ta2O5 processing we also performed rapid thermal. Annealing at 700°C and 900°C for 5 minutes which showed much improved electrical properties. All results suggest growth of high quality Ta2O5 films from a carbon-basud Ta liquid source, due to an effect of plasma enhanced deposition process.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 265: Symposium H – Materials Reliability in Microelectronics II , 1992 , 319
Copyright
Copyright © Materials Research Society 1992

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References

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