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Photolithography: a New Tool for Ceramic Science

Published online by Cambridge University Press:  21 February 2011

Jürgen Rödel  and
Andreas M. Glaeser
Jürgen Rödel
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD 20899
Andreas M. Glaeser
Affiliation:
Department of Materials Science and Mineral Engineering, University of California, and Materials and Chemical Sciences Division, Lawrence Berkeley Laboratory, Berkeley, CA 94720
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Abstract

A recently developed technique combining photolithography, ion beam milling, and hot pressing allows the production of submicron-scale controlled-geometry, controlled-crystallography pore structures in controlled misorientation bicrystals, single crystal-polycrystal ensembles, and polycrystal-polycrystal ensembles. Such microdesigned interfacial structures provide a new tool for studying fundamental aspects of microstructural evolution. Current applications of the technique, opportunities for future research, and future extensions and refinements of the technique are described.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 155: Symposium L – Processing Science of Advanced Ceramics , 1989 , 293
Copyright
Copyright © Materials Research Society 1989

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References

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