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Published online by Cambridge University Press: 25 February 2011
Integrated detection of light propagating in an optical waveguide by a photodetector array fabricated directly on the waveguide surface is demonstrated. Laser recrystallization of LPCVD polysilicon patterned with periodically-spaced anti-reflection stripes is utilized. Lateral p-i-n photodiode elements formed by ion implantation are characterized by reverse leakage currents of < 10−11 amp and a typical breakdown voltage of 50 volts. Optical response is found to be linear over a dynamic range of greater than 55 dB.