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Passivation of GaAs Laser Mirrors by Ion-Beam Deposited Al2O3
Published online by Cambridge University Press: 25 February 2011
Abstract
The use of ion-beam sputtered Al2O3 to passivate the mirrors of semiconductor injection lasers is described. Dense films, which offer considerable protection against corrosion, can be deposited without damage to the crystal surface. The overall quality of the passivation is demonstrated by long-term stress testing of the lasers.
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- Copyright © Materials Research Society 1989
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