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A Package for Fast FEM-based Simulation of X-ray Diffraction From Nano-structures

Published online by Cambridge University Press:  31 January 2011

Eugen Wintersberger  and
Jay Oswald
Eugen Wintersberger
Affiliation:
[email protected], Johannes Kepler University, Semiconductor Physics, Linz, Austria
Jay Oswald
Affiliation:
[email protected], Northwestern University, Theoretical and Applied Mechanics, Evanston, Illinois, United States
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Abstract

In this work a novel package for the calculation of the diffracted intensity from nano-structures based on finite element simulations is presented. Besides a short introduction into the algorithm which we have developed two examples namely the diffraction from Si/SiGe systems with ripples and quantum dots with dislocations are shown.

Keywords

x-ray diffraction (XRD)Sinanostructure
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1228: Symposium KK – Nanoscale Pattern Formation , 2009 , 1228-KK01-08
Copyright
Copyright © Materials Research Society 2010

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