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Organic Polymer Dielectrics in Microelectronic Technologies: Reliability Requirements, Testing, and Qualification

Published online by Cambridge University Press:  22 February 2011

P. H. Townsend ,
R. H. Heistand ,
D. Castillo ,
T. M. Stokich ,
B. Allen ,
M. Radler ,
T. Tarnowski ,
J. Blackson ,
H. Klassen  and
B. Miller
...Show all authors
P. H. Townsend
Affiliation:
The Dow Chemical Company, M. E. Pruitt Research Center, 1712 Building, Midland, MI 48674
R. H. Heistand
Affiliation:
The Dow Chemical Company, M. E. Pruitt Research Center, 1712 Building, Midland, MI 48674
D. Castillo
Affiliation:
The Dow Chemical Company, M. E. Pruitt Research Center, 1712 Building, Midland, MI 48674
T. M. Stokich
Affiliation:
The Dow Chemical Company, M. E. Pruitt Research Center, 1712 Building, Midland, MI 48674
B. Allen
Affiliation:
The Dow Chemical Company, M. E. Pruitt Research Center, 1712 Building, Midland, MI 48674
M. Radler
Affiliation:
The Dow Chemical Company, M. E. Pruitt Research Center, 1712 Building, Midland, MI 48674
T. Tarnowski
Affiliation:
The Dow Chemical Company, M. E. Pruitt Research Center, 1712 Building, Midland, MI 48674
J. Blackson
Affiliation:
The Dow Chemical Company, M. E. Pruitt Research Center, 1712 Building, Midland, MI 48674
H. Klassen
Affiliation:
The Dow Chemical Company, M. E. Pruitt Research Center, 1712 Building, Midland, MI 48674
B. Miller
Affiliation:
The Dow Chemical Company, M. E. Pruitt Research Center, 1712 Building, Midland, MI 48674
H. Theide
Affiliation:
IMC Microsystems, Teknikringen 3, S-583 30 Linköping, Sweden
J. Strandberg
Affiliation:
IMC Microsystems, Teknikringen 3, S-583 30 Linköping, Sweden
A. Karlsson
Affiliation:
IMC Microsystems, Teknikringen 3, S-583 30 Linköping, Sweden
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Abstract

This work reviews the dependence of reliability testing results on material processing and properties for polymeric materials used in high density interconnection technologies.Specific data are presented for CyclotenesTM 3022 resins containing divinylsiloxane bisbenzocyclobutene, (CAS 117732-87-3). Silane coupling agents discussed in this study are 3-aminopropyltriethoxysilane (CAS 01760-24-3)(APTES) and 3-methacryloxypropyl trimethoxysilane (CAS 02530-85-0) (MOP-TMS).

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 338: Symposium – Materials Reliability in Microelectronics IV , 1994 , 589
Copyright
Copyright © Materials Research Society 1994

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References

REFERENCES

1. Townsend, P. H., Schmidt, D., Stokich, T. M., Kisting, S., Burdeaux, D. C., Frye, D., Bernius, M., Lanka, M., and Berry, K., Proceedings of the Materials Research Society, 323, 365 (1994).Google Scholar
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