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Optical Waveguiding (Pb, La)(Zr,Ti)O3 Thin Films Prepared by Pulsed Laser Deposition

Published online by Cambridge University Press:  15 February 2011

S. B. Xiong ,
Z. G. Liu ,
X. Y. Chen ,
X. L. Guo ,
T. Yu ,
S. N. Zhu ,
X. Liu  and
W. G. Luo
S. B. Xiong
Affiliation:
National Laboratory of Solid State Microstructures, Nanjing University, Nanjing 210093, Peoples' Republic of China
Z. G. Liu
Affiliation:
National Laboratory of Solid State Microstructures, Nanjing University, Nanjing 210093, Peoples' Republic of China
X. Y. Chen
Affiliation:
National Laboratory of Solid State Microstructures, Nanjing University, Nanjing 210093, Peoples' Republic of China
X. L. Guo
Affiliation:
National Laboratory of Solid State Microstructures, Nanjing University, Nanjing 210093, Peoples' Republic of China
T. Yu
Affiliation:
National Laboratory of Solid State Microstructures, Nanjing University, Nanjing 210093, Peoples' Republic of China
S. N. Zhu
Affiliation:
National Laboratory of Solid State Microstructures, Nanjing University, Nanjing 210093, Peoples' Republic of China
X. Liu
Affiliation:
National Laboratory of Solid State Microstructures, Nanjing University, Nanjing 210093, Peoples' Republic of China
W. G. Luo
Affiliation:
Shanghai Institute of Ceramics, Chinese Academy of Science, Shanghai 200050, Peoples' Republic of China
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Abstract

The ferroelectric (Pb, La) (Zr,Ti)03 (PLZT(9.4/65/35)) optical waveguiding thin films have been prepared on SiO2 coated Si and on silica glass substrates by pulsed laser deposition. X-ray θ–2θ scans revealed that the films are single-phase pseudo-cubic perovskite. The surface chemical composition of the as grown films were determined by XPS. The ferroelectric properties of the films as grown on Pt/Ti coated silicon were demonstrated by using a modified Sawyer-Tower circuit, and the optical waveguiding properties of the films were characterized by using a rutile prism coupling method. The as grown films have an average transmittance of 80% in the wavelength range of 400˜2000nm and a refractive index of 2.2 at 632.8mn close to the bulk PLZT. The distinct m-lines of the guided TM and TE modes of the films as grown on SiO2 coated Si substrates have been observed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 444: Symposium I – Materials for Mechanical and Optical Microsystems , 1996 , 149
Copyright
Copyright © Materials Research Society 1997

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