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Optical Properties of Free-Standing Ultrahigh Porosity Silicon Films Prepared by Supercritical Drying

Published online by Cambridge University Press:  15 February 2011

J. Von Behren ,
P. M. Fauchet ,
E. H. Chimowitz  and
C. T. Lira
J. Von Behren
Affiliation:
Department of Electrical Engineering, University of Rochester, Rochester, NY 14627 also at the Technische Universität München, Garching, Germany
P. M. Fauchet
Affiliation:
Department of Electrical Engineering, University of Rochester, Rochester, NY 14627 also at the Laboratory for Laser Energetics and at the Institute of Optics
E. H. Chimowitz
Affiliation:
Department of Electrical Engineering, University of Rochester, Rochester, NY 14627 Department of Chemical Engineering, University of Rochester, Rochester, NY 14627
C. T. Lira
Affiliation:
Department of Electrical Engineering, University of Rochester, Rochester, NY 14627 Department of Chemical Engineering, Michigan State University, East Lansing, MI 48824
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Abstract

Highly luminescent free-standing porous silicon thin films of excellent optical quality have been manufactured by using electrochemical etching and lift-off steps combined with supercritical drying. One to 50 μm thick free-standing layers made from highly (p+) and moderately (p) Boron doped single crystal silicon (c-Si) substrates have been produced with porosities (P) up to 95 %. The Fabry-Pérot fringes observed in the transmission and photoluminescence (PL) spectra are used to determine the refractive index. At the highest P the index of refraction is below 1.2 from the IR to 2 eV. The absorption coefficients follow a nearly exponential behavior in the energy range from 1.2 eV and 4 eV. The porosity corrected absorption spectra of free-standing films made from p type c-Si substrates are blue shifted with respect to those prepared from p+ substrates. For P > 70 % a blue shift is also observed in PL. At equal porosities the luminescence intensities of porous silicon films made from p+ and p type c-Si are different by one order of magnitude.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 452 , 1996 , 565
Copyright
Copyright © Materials Research Society 1997

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References

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