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Optical Diagnostics for a High.Power, RF-Inductively Coupled Plasma

Published online by Cambridge University Press:  22 February 2011

N. S. Nogar ,
G. L. Keaton ,
J. E. Anderson  and
M. Trkula
N. S. Nogar
Affiliation:
Chemical and Laser Sciences Division, MS G738
G. L. Keaton
Affiliation:
Chemical and Laser Sciences Division, MS G738
J. E. Anderson
Affiliation:
Chemical and Laser Sciences Division, MS G738
M. Trkula
Affiliation:
Materials Science and Technology Division, MS G770 Los Alamos National Laboratory, Los Alamos, New Mexico, 87545
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Abstract

Emission spectroscopy and laser-induced fluorescence have been used to monitor the field and tail-flame regions of a Hull-design 1 inductively coupled plasma. This plasma is used for a variety of syntheses 2,3 including SiC, TiC, BN, AlN and diamond. Temporallyand spatially-resolved spectra of both pure Ar and Ar/gas mixtures have been studied as a function of RF power, pressure and flow rate. Preliminary data suggest that the system is far from local thermodynamic equilibrium.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 117: Symposium C – Process Diagnostics: Materials, Combustion, Fusion , 1988 , 125
Copyright
Copyright © Materials Research Society 1988

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References

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