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Optical Characterization of Hydrogenated Silicon Films in the Extended Energy Range

Published online by Cambridge University Press:  15 February 2011

T. Globus ,
S. J. Fonash  and
G. Gildenblat
T. Globus
Affiliation:
EE Department, University of Virginia, Charlottesville, VA 22903, [email protected]
S. J. Fonash
Affiliation:
Electronic Materials and Processing Research Laboratory, ESM Department, The Pennsylvania State University, University Park, PA 16802, [email protected]
G. Gildenblat
Affiliation:
Electronic Materials and Processing Research Laboratory, EE Department, The Pennsylvania State University, University Park, PA 16802, [email protected]
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Abstract

This work introduces a new interference technique for the diagnostic characterization of hydrogenated silicon thin films. The interference technique is based on new self-consistent data analysis algorithms for simultaneous optical transmission and specular reflection using exact interference equations for the system of a film on a substrate. It provides a quick non-destructive optical measurement of absorption coefficient and refractive index spectra of amorphous silicon (a-Si:H) and polycrystalline silicon (poly-Si:H) thin films in a wide range of the incident photon energies (0.5–3.5 eV). This non-contacting, high sensitivity method is a powerful probe of various material properties including thickness, refractive index and absorption spectra, hydrogen content, alloy fraction, energies of localized defect states and their concentrations. Experimental results for optical study of hydrogenated Si films indicate that the proposed method makes possible high precision measurements of the absorption in the region near the fundamental edge. In this region the absorption coefficient varies over several orders of magnitude. Also, the absorption related to impurities and defects in the subgap energy region at least from 102 cm−1 can be detected. As a result, the interference technique shows promise in providing feedback for monitoring film growth and device fabrication processes.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 406: Symposium L – Diagnostic Techniques for Semiconductor Materials Processing , 1995 , 313
Copyright
Copyright © Materials Research Society 1996

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