Hostname: page-component-78c5997874-4rdpn Total loading time: 0 Render date: 2024-11-09T05:44:31.697Z Has data issue: false hasContentIssue false

One of Many Sources of Defect Generation in SiC

Published online by Cambridge University Press:  21 March 2011

Igor I. Khlebnikov
Affiliation:
University of South Carolina, College of Engineering and Information Technology, Columbia, SC 29208, U.S.A.
Tangali S. Sudarshan
Affiliation:
University of South Carolina, College of Engineering and Information Technology, Columbia, SC 29208, U.S.A.
Yuri I. Khlebnikov
Affiliation:
Bandgap Technologies Inc., Columbia, SC, U.S.A.
Colin Wood
Affiliation:
Office of Naval Research, Arlington, VA, U.S.A.
Get access

Abstract

Silicon carbide is a unique material for the study of process of defect generation and crystallization. In this paper, for the first time, we report the observation of the entrapment of whiskers and dendrites (tree-like defects) within the volume of the growing monocrystalline SiC. The encapsulation of the tree-like defects in the volume of the grown crystal leads to solid state polytype transformation. According to Oswald rule, the most probable transformation sequence is as follows: 2H→3C→xR→4H, 6H until a stable phase is established for the given conditions of crystal growth. We observe that the entrapments of tree-like defects are the source of SiC defects such as micropipes and planar defects. It is very likely that the above process is also the source of dislocations. Practically, every branch of the tree-like structure generates the above mentioned defects (micropipes, planar defects, etc.). Our investigation (by EDAX) shows that the chemical composition of the tree-like defect is the same as that of bulk SiC. In this paper, we will present the mechanism of the entrapment of the tree-like defects in the bulk crystal.

Type
Research Article
Copyright
Copyright © Materials Research Society 2001

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Tairov, Yu. M. and Tsvetkov, V.F., J. Crystal Growth 43 (1978) 209.Google Scholar
2. Arrigo, Addamiano. J. Crystal Growth 58, 617(1982).Google Scholar
3. Bozack, M. J., Phys. Stat. Sol. (b) 202, 549 (1997).Google Scholar
4. Tsvetkov, V. F., Henshall, N. D., Brady, M. F., Glass, R. C., and Carter, C. H. Jr MRS Spring, 311 San Francisco, California (1998)Google Scholar
5. Khlebnikov, I., Cherednichenko, D., Khlebnikov, Y., Sudarshan, T. S., ICSCRM'99, P1,59 (1999).Google Scholar