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On the Stability of Hetastable and Amorphous Pvd-Compound Films

Published online by Cambridge University Press:  25 February 2011

Otto Knotelc ,
Frank Jungblut  and
Arman Barimani
Otto Knotelc
Affiliation:
Technical University Aachen,Institut für Werkstoffkunde B, Tempiergraben 55, D-5100 Aachen, Federal Republic of Germany
Frank Jungblut
Affiliation:
Hauzer Techno Coating Europe BV, Groethofstraat 22B, NL-5900 AE Venlo, The Netherlands
Arman Barimani
Affiliation:
Technical University Aachen,Institut für Werkstoffkunde B, Tempiergraben 55, D-5100 Aachen, Federal Republic of Germany
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Abstract

In using low temperature physical vapour deposition (PVD) techniques new metastable and amorphous materials can be deposited. Structural order in a coating is produced largely by the mobility of the adatoms. Low mobility does not allow the formation of equilibrium phases and metastable and/or amorphous structures are observed. These coatings have sufficient thermal stability for tools, and for both wear- and corrosion-protection. Examples are given within the systems Al-O-N, Ti-Al-N and Cr-Al-N and the properties, crystalline and thermodynamic state of the coatings are characterized. An example of decomposition phenomena is given in metastable thin coatings by the Ti-Zr-N system.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 157: Symposium A – Beam-Solid Interactions: Physical Phenomena , 1989 , 859
Copyright
Copyright © Materials Research Society 1990

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References

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