Hostname: page-component-f554764f5-nqxm9 Total loading time: 0 Render date: 2025-04-10T11:25:30.487Z Has data issue: false hasContentIssue false
  • English
  • Français

On the Stability of Hetastable and Amorphous Pvd-Compound Films

Published online by Cambridge University Press:  25 February 2011

Otto Knotelc ,
Frank Jungblut  and
Arman Barimani
Otto Knotelc
Affiliation:
Technical University Aachen,Institut für Werkstoffkunde B, Tempiergraben 55, D-5100 Aachen, Federal Republic of Germany
Frank Jungblut
Affiliation:
Hauzer Techno Coating Europe BV, Groethofstraat 22B, NL-5900 AE Venlo, The Netherlands
Arman Barimani
Affiliation:
Technical University Aachen,Institut für Werkstoffkunde B, Tempiergraben 55, D-5100 Aachen, Federal Republic of Germany
Get access

Abstract

In using low temperature physical vapour deposition (PVD) techniques new metastable and amorphous materials can be deposited. Structural order in a coating is produced largely by the mobility of the adatoms. Low mobility does not allow the formation of equilibrium phases and metastable and/or amorphous structures are observed. These coatings have sufficient thermal stability for tools, and for both wear- and corrosion-protection. Examples are given within the systems Al-O-N, Ti-Al-N and Cr-Al-N and the properties, crystalline and thermodynamic state of the coatings are characterized. An example of decomposition phenomena is given in metastable thin coatings by the Ti-Zr-N system.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 157: Symposium A – Beam-Solid Interactions: Physical Phenomena , 1989 , 859
Copyright
Copyright © Materials Research Society 1990

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

Article purchase

Temporarily unavailable

References

REFERENCES

1 Holleck, H., Surface and Coatings Technol. 36,151 (1988)Google Scholar
2 Barimani, A., Doctoral Thesis, Technical University Aachen, 1989 Google Scholar
3 Dragoo, A., Diamond, J.J., J. Amer. Ceram. Soc. 50, 568 (1967)Google Scholar
4 McCanley, J.W., J. Amer. Ceram. Soc. 61, 372 (1978)Google Scholar
5 Knotek, O., Bohmer, M., Leyendecker, T., Jungblut, F., Materials Science and Engineering A 105/106, 481 (1988)Google Scholar
6 Knotek, O., Bohmer, M., Leyendecker, T., J. Vac. Sci. Technol. A4, 2695 (1986)Google Scholar
7 Hofmann, S., Jehn, H.A., Atzor, M., Knotek, O., presented at the 16th Int. Conference on Metallurgical Coatings, San Diego, CA, USA, 1989 Google Scholar
8 Atzor, M., Doctoral Thesis, Technical University Aachen, 1989 Google Scholar
9 Kieffer, R., Nowotny, H., Ettmayer, P., Dufek, G., Metal 1 26, 701 (1972)Google Scholar
10 Holleck, H., Binäre und ternäre Carbid- und Nitridsysteme der Übergangs-metalle, Gebr. Borntrager, Berlin, 1984 Google Scholar
11 Cahn, J.W., Trans. AIME 242, 166 (1968)Google Scholar
12 Knotek, O., Atzor, M., Barimani, A., Jungblut, F., presented at the 16th Int. Conference on Metallurgical Coatings, San Diego, CA, USA, 1989 Google Scholar