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Observations Of Grain Growth In Thin Films

Published online by Cambridge University Press:  25 February 2011

D. A. Smith ,
S. J. Townsend  and
C. S. Nichols
D. A. Smith
Affiliation:
IBM Research Division, T.J.Watson Research Center, Yorktown Heights, NY10.598.
S. J. Townsend
Affiliation:
Departmcnt of Materials Science and engineering, Cornell University, IthacaNY14853.
C. S. Nichols
Affiliation:
Departmcnt of Materials Science and engineering, Cornell University, IthacaNY14853.
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Abstract

Grain growth occurs during the deposition and subsequent processing of metallic films. Observation of the grain structure by scanning ion probe microscopy and grain growth by in situ transmission electron microscopy using a heating stage serves to define some characteristic grain structures and their evolution in pure metal and alloy films used for metallisation.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 238: Symposium Cb – Structure and Properties of Interfaces in Materials , 1991 , 531
Copyright
Copyright © Materials Research Society 1992

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References

REFERENCES

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