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Nucleation of Internal Melt During Pulsed Laser Irradiation

Published online by Cambridge University Press:  26 February 2011

P. S. Peercy ,
Michael O. Thompson ,
J. Y. Tsao  and
J. M. Poate
P. S. Peercy
Affiliation:
Sandia National Laboratories, Albuquerque, NM, 87185
Michael O. Thompson
Affiliation:
Sandia National Laboratories, Albuquerque, NM, 87185
J. Y. Tsao
Affiliation:
Sandia National Laboratories, Albuquerque, NM, 87185
J. M. Poate
Affiliation:
AT&T Bell Laboratories, Murray Hill, NJ, 07974
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Abstract

Real-time measurements of the molten layer thickness and simultaneous measurements of the melt duration at the surface reveal that melt nucleates internally when Si implanted with low solid-solubility impurities such as In is melted with a 30 nsec laser pulse at 694 nm. Internal nucleation of melt was observed for all energy densities examined. Furthermore, at energy densities insufficient to melt the entire amorphous layer, internal nucleation of melt is followed by an explosive-like process in which a buried molten layer propagates toward the irradiated surface.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 51: Symposium A – Beam-Solid Interactions and Phase Transformations , 1985 , 125
Copyright
Copyright © Materials Research Society 1985

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References

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