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Novel Silicon-Elastomers for Advanced Soft Lithography

Published online by Cambridge University Press:  01 February 2011

Kyung Choi
Kyung Choi*
Affiliation:
[email protected], Bell Labs, Nanotechnology, 600-700 mauntain Ave, Murray Hill, NJ, 07974, United States
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Abstract

High resolution pattern transfers in the nano-scale regime have been considerable challenges in ‘soft lithography’ to achieve nanodevices with enhanced performances. In this technology, the resolution of pattern integrations is significantly rely on the materials' properties of polydimethylsiloxane (PDMS) stamps. Since commercial PDMS stamps have shown limitations in nano-scale resolution soft lithography due to their low physical toughness and high thermal expansion coefficients, we developed stiffer, photocured PDMS silicon elastomers designed, specifically for nano-sized soft lithography and photopatternable nanofabrications.

Keywords

nanoscalepolymerchemical synthesis
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 947: Symposium A – Responsive Soft Matter – Chemistry and Physics for Assemblages, Films and Forms , 2006 , 0947-03-26
Copyright
Copyright © Materials Research Society 2007

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References

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