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Novel Precursors for the Deposition of II-VI Semiconductor Films

Published online by Cambridge University Press:  25 February 2011

Manfred Bochmann  and
Kevin J. Webb
Manfred Bochmann
Affiliation:
School of Chemical Sciences, University of East Anglia, Norwich NR4 7TJ., United Kingdom
Kevin J. Webb
Affiliation:
School of Chemical Sciences, University of East Anglia, Norwich NR4 7TJ., United Kingdom
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Abstract

Highly sterically hindered chalcogenolato complexes M(EC6H2R3-2,4,6)2 (M = Zn, Cd, Hg; E = S, Se, Te; R = Me, Pri, But) have been prepared. Compounds with R -= But are volatile under reduced pressure and are suitable as precursors for the deposition of II-VI films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 204: Symposium E – Chemical Perspectives of Microelectronic Materials II , 1990 , 149
Copyright
Copyright © Materials Research Society 1991

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References

REFERENCES

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