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Next Generation Processes and Equipment that Lead to Positive Environment, Safety, and Health Impacts

Published online by Cambridge University Press:  10 February 2011

Phyllis Pei  and
H. Ray Kerby
Phyllis Pei
Affiliation:
SEMATECH, Inc.2706 Montopolis Dr. Austin, TX 78741 ph: 512/356‐3872 fax: 512/356‐[email protected]@ internet
H. Ray Kerby
Affiliation:
SEMATECH, Inc.2706 Montopolis Dr. Austin, TX 78741 ph: 512/356‐3872 fax: 512/356‐[email protected]@ internet
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Abstract

The technology development needed to support the continuous improvement of Environment, Safety, and Health (ESH) characteristics of semiconductor manufacturing facilities is changing as strategies for source reduction and incident prevention and more refined schemes for assessing ESH improvement emerge. This paper summarizes the changes taking place in ESH management structure and focuses on examples of current technology development to satisfy the new model of ESH execution.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 447: Symposium L – Environmental, Safety, and Health Issues in IC Pro…… , 1996 , 77
Copyright
Copyright © Materials Research Society 1997

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