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New transparent conductors anatase Ti1−xMxO2 (M=Nb,Ta): transport and optical properties

Published online by Cambridge University Press:  26 February 2011

Yutaka Furubayashi ,
Taro Hitosugi ,
Yukio Yamamoto ,
Yasushi Hirose ,
Makoto Otani ,
Kiyomi Nakajima ,
Toyohiro Chikyow ,
Toshihiro Shimada  and
Tetsuya Hasegawa
Yutaka Furubayashi
Affiliation:
[email protected], Kanagawa Academy of Science and Technology, Hasegawa project, KSP east 504, 3-2-1 Sakado,Takatsu-ku, Kawasaki, N/A, 213-0012, Japan, +81-44-819-2081, +81-44-819-2083
Taro Hitosugi
Affiliation:
[email protected], Kanagawa Academy of Science and Technology, Hasegawa project, Japan
Yukio Yamamoto
Affiliation:
[email protected], Kanagawa Academy of Science and Technology, Hasegawa project, Japan
Yasushi Hirose
Affiliation:
[email protected], Kanagawa Academy of Science and Technology, Hasegawa project, Japan
Makoto Otani
Affiliation:
[email protected], Kanagawa Academy of Science and Technology, Hasegawa project, Japan
Kiyomi Nakajima
Affiliation:
[email protected], National Institute for Material Science, Japan
Toyohiro Chikyow
Affiliation:
[email protected], National Institute for Material Science, Japan
Toshihiro Shimada
Affiliation:
[email protected], Kanagawa Academy of Science and Technology, Hasegawa project, Japan
Tetsuya Hasegawa
Affiliation:
[email protected], Kanagawa Academy of Science and Technology, Hasegawa project, Japan
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Abstract

We have discovered new transparent conducting oxides (TCOs), anatase Ti1-xMxO2 (M=Nb,Ta), in thin film form. Both films with 0.03 ≤ × ≤ 0.06 showed resistivity of 2−3 × 10−4 Ωcm and internal transmittance of ∼95% in the visible light region (40 nm in thickness), at room temperature. These values are comparable to those of typical TCOs, such as In2−xSnxO3 (ITO).

Keywords

transparent conductorelectrical propertiesoptical properties
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 905: Symposium DD – Materials for Transparent Electronics , 2005 , 0905-DD02-01
Copyright
Copyright © Materials Research Society 2006

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References

1 Ginley, D. S. and Bright, C., Mater. Res. Bull. 25, 15 (2000).Google Scholar
2 Pan, C. A. and Ma, T. P., Appl. Phys. Lett. 37, 163 (1980).Google Scholar
3 Hamberg, I. and Granqvist, C. G., J. Appl. Phys. 60, R123 (1986).Google Scholar
4 Minami, T., Mater. Res. Bull. 25, 38 (2000).Google Scholar
5 Furubayashi, Y., Hitosugi, T., Yamamoto, Y., Inaba, K., Kinoda, G., Hirose, Y., Shimada, T., and Hasegawa, T., Appl. Phys. Lett. 86, 252101 (2005).Google Scholar
6 Hitosugi, T., Furubayashi, Y., Ueda, A., Itabashi, K., Inaba, K., Hirose, Y., Kinoda, G., Yamamoto, Y., Shimada, T., and Hasegawa, T., Jpn. J. Appl. Phys. 44, L1063 (2005).Google Scholar
7 Tang, H., Berger, H., Schmid, P. E., Lévy, F., and Burri, G., Solid State Commun. 23, 161 (1977).Google Scholar
8 Tang, H., Prasad, K., Sanjines, R., Schmid, P. E., and Lévy, F., J. Appl. Phys. 75, 2042 (1994).Google Scholar
9 Taylor, S. R., and McLennan, S. H., The Continental Crust: Its Composition and Evolution, Blackwell, Oxford, p.312 (1985).Google Scholar
10 Shannon, R., Acta Crystallogr. Sect. A 32, 751 (1976).Google Scholar
11 Shigesato, Y., Paine, D. C., and Haynes, T. E., J. Appl. Phys. 73, 3805 (1993).Google Scholar