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A New Technique for High Speed X-Ray Double Crystal Rocking Curve analysis

Published online by Cambridge University Press:  25 February 2011

B. K. Tanner ,
Chu Xi  and
D. K. Bowen
B. K. Tanner
Affiliation:
Department of Physics, University of Durham, South Road, Durham, DH1 3LE, U.K.
Chu Xi
Affiliation:
Department of Physics, University of Durham, South Road, Durham, DH1 3LE, U.K. On leave from Chinese Academy of Sciences, Beijing.
D. K. Bowen
Affiliation:
Department of Physics, University of Durham, South Road, Durham, DH1 3LE, U.K. Department of Engineering, University of Warwick, Coventry CV4 7AL, U.K.
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Abstract

A novel technique for high speed X-ray double crystal rocking curve analysis of epitaxial layers is described. It employs specimen rotation about an axis almost normal to the Bragg planes in order to optimize Bragg plane tilts. Very rapid set-up is possible by peak searching using this rotation axis rather than the standard ω scan. A rotation stage suitable for a Bede Scientific Instrument Model 6 diffractometer is described and its performance assessed. Experimental and theoretical values of the shift in centroid of the ω scan rocking curve as a function of rotation angle are in excellent agreement.

Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 69: Symposium D – Materials Characterization , 1986 , 191
Copyright
Copyright © Materials Research Society 1986

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References

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