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New Insights Into Oxide Trapped Holes And Other Defects: Implications For Reliability Studies

Published online by Cambridge University Press:  15 February 2011

Timothy R. Oldham  and
Aivars J. Lelis
Timothy R. Oldham
Affiliation:
U.S. Army Research Laboratory, 2800 Powder Mill Road, Adelphi, MD 20783
Aivars J. Lelis
Affiliation:
U.S. Army Research Laboratory, 2800 Powder Mill Road, Adelphi, MD 20783
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Abstract

New insights into the nature of oxide trapped holes and other defects have been gained from ionizing radiation studies. Specifically, connections have been established between hole traps and neutral traps. The nature of the defects, how they are related to each other, and their implications for reliability studies will be discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 428: Symposium L – Materials Reliability in Microelectronics VI , 1996 , 329
Copyright
Copyright © Materials Research Society 1996

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