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New Developments in the Dynamic Mechanical Analysis of Thin-Layer Materials

Published online by Cambridge University Press:  26 February 2011

B.S. Berry  and
W.C. Pritchet
B.S. Berry
Affiliation:
IBM Research Division, Thomas J. Watson Research Center, P.O. Box 218, Yorktown Heights, New York 10598
W.C. Pritchet
Affiliation:
IBM Research Division, Thomas J. Watson Research Center, P.O. Box 218, Yorktown Heights, New York 10598
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Abstract

The vibrating-membrane configuration represents an important new approach to the dynamic mechanical analysis of thin-layer materials. The method offers a convenient capability for high-resolution stress measurements over a wide temperature range, and can be combined if desired with internal friction measurements for the detection of defect-related relaxation peaks. Illustrative results are given for the thermomechanical behavior of silicon, silicon carbide, and synthetic diamond membranes, and for the moisture swelling of polyimide films. A detailed study of hydrogen-boron point defects in silicon is in progress, using both internal stress and internal friction measurements, and work on membranes has been supplemented significantly by the use of vibrating-string and ultra-thin vibrating-reed samples.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 226: Symposium H – Mechanical Behavior of Materials and Structures in Microelectronics , 1991 , 179
Copyright
Copyright © Materials Research Society 1991

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References

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