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Nanostructure Study of Ti/TiN Multilayers: Effect of the Deposition Temperature

Published online by Cambridge University Press:  10 February 2011

S. Labdi ,
C. Sant ,
L. Hennet  and
Ph. Houdy
S. Labdi
Affiliation:
L.M.N., Université d'Evry Val d'Essonne, Boulevard des Coquibus, 91025 Evry cedex, France.
C. Sant
Affiliation:
L.M.N., Université d'Evry Val d'Essonne, Boulevard des Coquibus, 91025 Evry cedex, France.
L. Hennet
Affiliation:
L.P.M., Université Henri Poincaré, Nancy 1, 54506 Vandoeuvre Les Nancy cedex, France.
Ph. Houdy
Affiliation:
L.M.N., Université d'Evry Val d'Essonne, Boulevard des Coquibus, 91025 Evry cedex, France.
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Abstract

In this paper, we report on the growth and the study of Ti/TiN nanometric multilayers. The preparation of these films has been carried out by high vacuum diode r.f. sputtering. Growth was in-situ monitored by kinetic ellipsometry. Deposition temperature was kept to room and low temperature (-120°C) respectively in order to modify the interface properties and consequently to understand the effect of the interfaces on the film's mechanical properties.

The thickness of each layer was varied from 1 nm to 10 nm and alternately repeated in order to obtain a total thickness of 200 nm. After deposition, films were characterized by means of X-ray diffraction and grazing X-ray reflectometry for structural determination. This study shows that the TiN-Ti boundary is composed of TiNx, with x going from the nominal nitrogen concentration of the TiN layer to 0. This can be due either to a surface reaction of the incident titanium during the Ti sequence with the nitrogen present at the film surface or to a reaction of nitrogen with the target surface during the TiN sequence.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 441: Thin Films – Structure and Morphology , 1996 , 711
Copyright
Copyright © Materials Research Society 1997

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References

1. Hogmark, S. and Hedenqvist, P., Wear 179 (1994) 147.Google Scholar
2. Barthelemy, A. et al., J. Appi. Phys. 67 (1990) 5908.Google Scholar
3. Barbee, T.W., Proc. SPIE 563 (1985) 2.Google Scholar
4. Labdi, S., Houdy, Ph., Psyllaki, P. and Jeandin, M., Thin Solid Films 275 (1996) 213.Google Scholar
5. Houdy, Ph., Psyllaki, P., Labdi, S., Suenaga, K. and Jeandin, M., Proc. of the MRS spring meeting, San Francisco, 1996.Google Scholar
6. Papaphilippou, C. et al., 6th Int. Conf. on Tribology, Budapest 3 (1993) 26.Google Scholar