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Nanostructural Evolution in Non-epitaxial Growth of Thin Films

Published online by Cambridge University Press:  01 February 2011

Minghui Hu ,
Suguru Noda  and
Hiroshi Komiyama
Minghui Hu
Affiliation:
[email protected], Brookhaven National Laboratory, Biology Department, Brookhaven National Laboratory, Upton, NY, 11973, United States, 631 344 3747, 631 344 3407
Suguru Noda
Affiliation:
[email protected], The University of Tokyo, Department of Chemical System Engineering, 7-3-1 Hongo, Bunkyo-ku, Tokyo, 113-8656, Japan
Hiroshi Komiyama
Affiliation:
[email protected], The University of Tokyo, Department of Chemical System Engineering, 7-3-1 Hongo, Bunkyo-ku, Tokyo, 113-8656, Japan
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Abstract

The initial growth of non-epitaxial thin films was studied and discussed using the concept that thermodynamics controls the unit-structure within the surface diffusion length of deposits, whereas kinetics controls the ensemble-structure on a large scale. Three basic topics, growth mode (island shape), crystalline (island inner) structure, time-dependent properties of island ensemble (island size, distance, and density), are summarized based on the investigation of thin film growth of metals on TiO2, Cu on SiO2 and Ti/SiO2. This study provides fundamental understanding of structural control during thin film growth, and further can be applied to various advanced devices for electronics, photonics, catalysis, and energy applications.

Keywords

physical vapor deposition (PVD)nanostructurethin film
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 961: Symposium O – Nanostructured and Patterned Materials for Information Storage , 2006 , 0961-O05-04
Copyright
Copyright © Materials Research Society 2007

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References

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