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Nanofabrication at Biologically Important Length Scale: Etching of Dislocation Array in Twist-bonded Bicrystals

Published online by Cambridge University Press:  15 March 2011

Fang Mei ,
Martin J. Murtagh ,
Stephen L. Sass ,
Rikard A. Wind ,
Yu Wang  and
Melissa A. Hines
Fang Mei
Affiliation:
Department of Materials Science and Engineering, Cornell University, Ithaca NY14853
Martin J. Murtagh
Affiliation:
Department of Materials Science and Engineering, Cornell University, Ithaca NY14853
Stephen L. Sass
Affiliation:
Department of Materials Science and Engineering, Cornell University, Ithaca NY14853
Rikard A. Wind
Affiliation:
Department of Chemistry, Cornell University, Ithaca, NY14853
Yu Wang
Affiliation:
Department of Chemistry, Cornell University, Ithaca, NY14853
Melissa A. Hines
Affiliation:
Department of Chemistry, Cornell University, Ithaca, NY14853
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Abstract

A process to fabricate a periodic surface structure at biologically important length scale is developed and nanostructured silicon surface with a periodicity of 38 nm has been obtained. The technique relies on controlled etching of a dislocation array in the twist boundaries formed by silicon bicrystals. The deviation from a perfect periodic structure and the method to improve the perfection have been investigated.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 705: Symposium Y – Nanopatterning–From Ultralarge-Scale Integration to Biotechnology , 2001 , Y9.8
Copyright
Copyright © Materials Research Society 2002

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References

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