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Nanocrystalline Microstructures by Thin-Film Synthesis Methods

Published online by Cambridge University Press:  15 February 2011

M. Libera  and
D. A. Smith
M. Libera
Affiliation:
Stevens Institute of Technology, Hoboken, NJ 07030
D. A. Smith
Affiliation:
Stevens Institute of Technology, Hoboken, NJ 07030
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Abstract

Nanostructured materials are being extensively studied because their ∼1–100nm grain size can dramatically affect properties. Most nanocrystalline synthesis methods produce particulate or flake. The process of consolidation also allows coarsening, contamination, and the introduction of porosity. The effect of nanocrystallinity on mechanical properties must be deconvoluted from these extrinsic artifacts. Most synthesis routes also produce small quantities of material. Reproducibly making enough specimens to explore more than a few properties is thus difficult. This paper describes thin-film processes to produce nanostructured materials. Thin-film deposition can easily produce many specimens, free from extrinsic artifacts, with identical composition and processing history. Many methods are now well established to study a variety of thin-film mechanical properties. We show examples of nanostructured films generated by controlling deposition and/or post-deposition processing.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 343: Symposium H – Polycrystalline Thin Films - Structure, Texture, Properties and Applications , 1994 , 125
Copyright
Copyright © Materials Research Society 1994

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References

REFERENCES

1. Birringer, R., Gleiter, H., Klein, H., and Marquardt, P., Phys. Lett. 102A, (1984) 365.Google Scholar
2. Frost, H.J. and Ashby, M.F., Deformation-Mechanism Maps, Pergamon Press, Oxford (1982).Google Scholar
3. Siegel, R., Ann. Rev. Mater. Sci. 21, (1991) 559.Google Scholar
4. Koch, C.C., Nanostructured Materials 2, (1993) 109–129.Google Scholar
5. McCandlish, L. and Kear, B., Mat. Sci. & Tech. 6, 953 (1990).Google Scholar
6. Thin Films - Stresses and Mechanical Properties IV, ed. Townsend, P. et al., Mat. Res. Soc. Symp. Proc. V308 (1993) and prior MRS Symposia on this subject.Google Scholar
7. Movchan, B. and Demchishin, A., Phys. Met. Metallogr. 28, 83 (1969)Google Scholar
8. Grovenor, C.R.M., Hentzell, H.T.G., and Smith, D.A., Acta Metall. 32, 773 (1984).Google Scholar
9. Thornton, J.A., Ann. Rev. Mater. Sci. 2, 239 (1977).Google Scholar
10. Hentzell, H.T.G., Grovenor, C.R.M., and Smith, D.A., J. Vac. Sci. Tech. A2, 218 (1984).Google Scholar
11. Smith, D.A., Tu, K., and Weiss, B., Ultramicro. 23, 405 (1987).Google Scholar
12. Smith, D.A. et al. , Mat. Res. Soc. Symp. Proc. 321, 271 (1994)Google Scholar
13. Libera, M. et al, Mat. Res. Soc. Symp. Proc. 280, 715 (1993).Google Scholar
14. Liu, X., Wang, J., Ding, B., Scr. Met. Mater. 28, 59 (1993).Google Scholar
15. Luck, R., Lu, K., Frantz, W., Scr. Met. Mater. 28, 1071 (1993)Google Scholar
16. Allen, C.W. and Smith, D.A., Mat. Res. Soc. Symp. Proc. 201, 405 (1991)Google Scholar
17. Im, J. and Atwater, H., Appl. Phys. Lett. 57, 1766 (1990).Google Scholar
18. Libera, M., Chen, M., and Rubin, K., Mater, J.. Res. 7, 2666–2676 (1991)Google Scholar