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Nanocomposite Conductive Elastomer: Microfabrication Processes and Applications in Soft-Matter MEMS Sensors

Published online by Cambridge University Press:  01 February 2011

Chang Liu
Chang Liu*
Affiliation:
[email protected], University of Illinois at Urbana-Champaign, Micro and Nanotechnology Laboratory, 208 North Wright Street, Urbana, IL, 61801, United States, 1-217-333-4051
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Abstract

3D micro-molded PDMS (polydimethylsiloxane) elastomer is widely used in MEMS. However, traditional PDMS is non-conductive and as a result is used in mostly structural applications. It is difficult to embed elastomeric, “stretchy” conductors and transduction elements in molded PDMS matrix. We report general methods for monolithic fabrication of multi-layer PDMS structures with embedded conductive and non-conductive elastomer elements. Conductive PDMS parts, made of carbon-nanotube-filled composite PDMS, can form internal elastomer wires, electrodes, heaters, and sensors. The process uses a series of PDMS patterning, micromolding, and bonding techniques. In this work we demonstrate elastomer strain gauges, capacitive pressure sensors, as well as microfluidic channels with integrated heaters and sensors.

Keywords

microelectro-mechanical (MEMS)machiningnanostructure
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 947: Symposium A – Responsive Soft Matter – Chemistry and Physics for Assemblages, Films and Forms , 2006 , 0947-07-01
Copyright
Copyright © Materials Research Society 2007

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References

REFERENCES

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