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My Modeling Nanocluster Formation During Ion Beam Synthesis

Published online by Cambridge University Press:  31 January 2011

Chun-Wei Yuan ,
Diana O. Yi ,
Ian D. Sharp ,
Swanee J. Shin ,
Christopher Y. Liao ,
Julian Guzman ,
Joel Ager ,
Eugene Haller  and
Daryl Chrzan
Chun-Wei Yuan
Affiliation:
[email protected], University of California, Berkeley, Materials Science, Berkeley, CA 94720, California, United States
Diana O. Yi
Affiliation:
[email protected], University of California, Berkeley, Materials Science, Berkeley, CA 94720, California, United States
Ian D. Sharp
Affiliation:
[email protected], Technische Universtät München, Walter Schottky Institut, Garching, Germany
Swanee J. Shin
Affiliation:
[email protected], University of California, Berkeley, Materials Science, Berkeley, CA 94720, California, United States
Christopher Y. Liao
Affiliation:
[email protected], University of California, Berkeley, Materials Science, Berkeley, CA 94720, California, United States
Julian Guzman
Affiliation:
[email protected], University of California, Berkeley, Materials Science, Berkeley, CA 94720, California, United States
Joel Ager
Affiliation:
[email protected], United States
Eugene Haller
Affiliation:
[email protected], University of California, Berkeley, Materials Science, Berkeley, CA 94720, California, United States
Daryl Chrzan
Affiliation:
[email protected], University of California, Berkeley, Materials Science, Berkeley, CA 94720, California, United States
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Abstract

Ion beam synthesis of nanoclusters is studied via both kinetic Monte Carlo simulations and the self-consistent mean-field solution to a set of coupled rate equations. Both approaches predict a steady-state shape for the cluster size distribution that depends only on a characteristic length determined by the ratio of the effective diffusion coefficient times the effective solubility to the ion flux. The average cluster size in the steady state regime is determined by the implanted species/matrix interface energy.

Keywords

ion-beam processingnucleation & growthnanostructure
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1181: Symposium DD – Ion Beams and Nano-Engineering , 2009 , 1181-DD04-02
Copyright
Copyright © Materials Research Society 2009

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References

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