Hostname: page-component-78c5997874-s2hrs Total loading time: 0 Render date: 2024-11-19T06:07:45.808Z Has data issue: false hasContentIssue false
  • English
  • Français

A Monte Carlo Model of GaAs [111]B Epitaxy

Published online by Cambridge University Press:  22 February 2011

Donald L. Dorsey ,
R. Venkatasubramanian ,
M.Y. Yen  and
T.W. Haas
Donald L. Dorsey
Affiliation:
Wright Laboratory, Materials Directorate (WL/MLPO), 3005 P Street, Wright-Patterson Air Force Base, OH 45433-7707
R. Venkatasubramanian
Affiliation:
University of Nevada-Las Vegas, Department of Electrical and Computer Engineering, 4505 Maryland Parkway, Las Vegas, NV 89154-4026
M.Y. Yen
Affiliation:
University of Dayton Research Institute, 300 College Park, Dayton, OH 45469-0001
T.W. Haas
Affiliation:
Wright Laboratory, Materials Directorate (WL/MLBM), 2941 P Street, Wright-Patterson Air Force Base, OH 45433-7750
Get access

Abstract

The Monte Carlo (MC) technique has been frequently used to model semiconductor thin-film epitaxy, especially for the cases of homo-epitaxial growth on Si (100) and GaAs (100) surfaces. In a recent paper, it was shown that excellent qualitative agreement can be obtained between the surface step density evolution as simulated by a simple cubic MC model and the experimentally observed RHEED specular intensity oscillations on stepped GaAs (100) substrates during growth by MBE [1]. The simple cubic model performs well for this case because of the rectangular arrangement of the gallium atoms in the (100) planes of the gallium sublattice. For the case of the (111) surface, however, the gallium atoms in the (111) plane of the gallium sublattice are hexagonally arranged. This system is not amenable to simulation with a simple cubic MC model. In this work, GaAs [111]B epitaxy is modeled using the MC method on a zincblende lattice. To ourknowledge this is the first application of this technique to the growth of a zincblende thin-film in the [11]B direction..The predicted surface step density evolution is compared to experimental RHEED specular intensity oscillations. The relative merits of using on-axis and off-axis substrates are explored.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 340: Symposium E – Compound Semiconductor Epitaxy , 1994 , 41
Copyright
Copyright © Materials Research Society 1994

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Shitara, T., Vvedensky, D.D., Wilby, M.R., Zhang, J., Neave, J.H., Joyce, B.A., Appl. Phys. Lett. 60, 1504 (1992)Google Scholar
2. Mailhiot, C. and Smith, D.L., Phys. Rev. B 35, 1242 (1987)Google Scholar
3. Cho, A.Y., J. Appl. Phys. 41, 2780 (1970)Google Scholar
4. Yen, M.Y. and Haas, T. W., J. Vac. Sci. Technol. B 8(2), 308 (1990); Appl. Phys. Lett. 56(25), 2533 (1990)Google Scholar
5. Chen, P., Rajkumar, K.C. and Madhukar, A., Appl. Phys. Lett. 58(16), 1771 (1991)Google Scholar
6. Chen, P., Rajkumar, K.C. and Madhukar, A., J. Vac. Sci. Technol. B 9(4), 2312 (1991)Google Scholar
7. Takano, Y., Lopez, M., Torihata, T., Ikei, T., Kanaya, Y., Pak, K. and Yonezu, H., J. Cryst. Growth 111, 216 (1991)Google Scholar
8. Shitara, T., Kondo, E. and Nishinaga, T., J. Crystal Growth 99, 530 (1990)Google Scholar
9. Yang, K., Schowalter, L.J., Laurich, B.K., Campbell, I.H. and Smith, D.L., J. Vac. Sci. Technol B 11(3), 779 (1993)Google Scholar
10. Biegelsen, D.K., Bringans, R.D., Northrup, J.E. and Swartz, L.-E., Phys. Rev. Lett. 65(4), 452 (1990)Google Scholar
11. Venkatasubramanian, R., Dorsey, D.L. and Das, S.G., in Evolution of Surface and Thin Film Microstructure, edited by Atwater, H.A., Chason, E., Grabow, M.H. and Lagally, M.G. (Mat. Res. Soc. Proc. 280, Boston, MA, 1992) pp. 179–182 Google Scholar
12. Cspregi, L., Kennedy, E.F., Mayer, J.W. and Sigmon, T.W., J. Appl. Phys. 49, 3906 (1978)Google Scholar
13. Yang, K., Schowalter, L.J. and Thundat, T.G., in Evolution of Surface and Thin Film Microstructure, edited by Atwater, H.A., Chason, E., Grabow, M.H. and Lagally, M.G. (Mat. Res. Soc. Proc. 280, Boston, MA, 1992) pp. 143–146 Google Scholar