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Molecular-Dynamics Simulations of Low-Energy Ion/Surface Interactions During Ion-Beam-Assisted Thin Film Deposition.

Published online by Cambridge University Press:  15 February 2011

H. Feil
H. Feil*
Affiliation:
Philips Research Laboratories, Prof. Holstlaan 4, 5656 AA Eindhoven, The Netherlands.
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Abstract

Molecular dynamics simulations are performed of low-energy ion irradiation of two-dimensional Cu islands on a Cu(111) surface. The irradiation of the surface with low-energy particles influences the mobility of the atoms in the surface region and therefore may alter the thin film growth Mode. The effect of 100 eV Ar+ ions incident at grazing angles is limited to situations in which the ions hit the edges of the islands. In Most cases the islands lose one or two atoms. Changing the angle-of-incidence or changing the type of the incident particle has a strong influence on the size distribution of the two-dimensional islands.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 317: Symposium B – Mechanisms of Thin Film Evolution , 1993 , 609
Copyright
Copyright © Materials Research Society 1994

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References

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