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Molecular Sieve Based Chemical Sensors

Published online by Cambridge University Press:  15 February 2011

Laura J. Sottile ,
Kenneth J. Balkus JR. ,
Scott J. Riley  and
Bruce E. Gnade
Laura J. Sottile
Affiliation:
University of Texas at Dallas, Department of Chemistry, Richardson, TX 75083-0688
Kenneth J. Balkus JR.
Affiliation:
University of Texas at Dallas, Department of Chemistry, Richardson, TX 75083-0688
Scott J. Riley
Affiliation:
University of Texas at Dallas, Department of Chemistry, Richardson, TX 75083-0688
Bruce E. Gnade
Affiliation:
Materials Science Laboratory, Semiconductor Research and Development, Texas Instruments, Inc., Dallas, TX 75265
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Abstract

By virtue of their shape selectivity and stability, molecular sieves are ideal components for discriminating chemical sensors. In this paper we report the preparation of capacitance type sensors based on aluminum phosphate molecular sieves. Thin films of the molecular sieves AlPO4-5, A1PO 4-H3 and AlPO4-H1, which cover a range of pore dimensions, were deposited on titanium nitride coated silicon wafers by laser ablation. A subsequent hydrothermal treatment followed by a Pd/Au coating and the application of standard photoresist/masking techniques were used to generate the capacitors. The molecular sieves exhibit significant changes in capacitance upon exposure to target molecules, including CO2, CO, N2, H2O and toluene.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 351: Symposium V – Molecularly Designed Ultrafine/Nanostructured Materials , 1994 , 263
Copyright
Copyright © Materials Research Society 1994

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References

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