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Moisture and Purity in Polyimide Coatings

Published online by Cambridge University Press:  21 February 2011

A. J. Beuhler ,
M. J. Burgess ,
D. E. Fjare ,
J. M. Gaudette  and
R. T. Roginski
A. J. Beuhler
Affiliation:
Amoco Chemical Company, P. O. Box 400, Naperville, IL 60566
M. J. Burgess
Affiliation:
Amoco Chemical Company, P. O. Box 400, Naperville, IL 60566
D. E. Fjare
Affiliation:
Amoco Chemical Company, P. O. Box 400, Naperville, IL 60566
J. M. Gaudette
Affiliation:
Amoco Chemical Company, P. O. Box 400, Naperville, IL 60566
R. T. Roginski
Affiliation:
Amoco Chemical Company, P. O. Box 400, Naperville, IL 60566
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Extract

Moisture and ionic impurities play a major role in the failure mechanism of integrated devices. [1] The use of organic polymers as microelectronic coatings offers advantages in improved planarization of metal steps, low temperature processibility, and reduction of mechanical stresses. [2] Cited disadvantages are the high inherent moisture absorption and level of impurities. Polymers introduce levels of moisture and impurities 10–100 times greater than vacuum deposited inorganic insulators.[3] Moreover, the combination of ionic impurities and a high humidity environment will degrade attractive polymer properties such as high resistivity and low dielectric constant. [4]

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 154: Symposium K – Electronic Packaging Materials Science IV , 1989 , 73
Copyright
Copyright © Materials Research Society 1989

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References

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