Hostname: page-component-78c5997874-v9fdk Total loading time: 0 Render date: 2024-11-19T05:45:00.939Z Has data issue: false hasContentIssue false
  • English
  • Français

Modifications of Diamond Films Induced by Pulsed Laser Treatment

Published online by Cambridge University Press:  15 February 2011

E. Cappelli ,
G. Mattei ,
S. Orlando ,
F. Pinzari  and
P. Ascarelli
E. Cappelli
Affiliation:
CNR-IMAI, P.O.Box 10, 1-00016 Monterotondo Scalo, Roma, Italy
G. Mattei
Affiliation:
CNR-IMAI, P.O.Box 10, 1-00016 Monterotondo Scalo, Roma, Italy
S. Orlando
Affiliation:
CNR-IMS, P.O.Box 27, 1-85050 Tito Scalo, Potenza, Italy
F. Pinzari
Affiliation:
CNR-IMAI, P.O.Box 10, 1-00016 Monterotondo Scalo, Roma, Italy
P. Ascarelli
Affiliation:
CNR-IMAI, P.O.Box 10, 1-00016 Monterotondo Scalo, Roma, Italy
Get access

Abstract

Diamond thin films promise excellent performance in several application fields such as high temperature and high frequency electronics, but practical applications are presently limited by the polycrystalline morphology of deposited films.

A laser treatment was performed to smooth the surface of diamond films, produced by HFCVD, with the aim to allow a suitable patterning and tayloring of diamond films and their use as coatings on specific tools. Different laser wavelengths (193, 532 nm), times of exposure, and energy densities were employed during the treatments.

A SEM characterization has shown a structural modification of the surface morphology and a noticeable weakening of surface roughness. A microRaman analysis indicated the appearance of a glassy carbon component which, together with the surface smoothing occurring at the treated zone, seems to justify: a) the large reduction of the intensity of Raman spectra (the diamond and silicon optical phonon lines and the photoluminescence emission are about 50 times weaker); b) the enhancement of conductivity and reflectivity.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 526: Symposium Y – Advances in Laser Ablation of Materials , 1998 , 131
Copyright
Copyright © Materials Research Society 1998

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

[1] Plano, M.A., in Diamond: Electronic Properties and Applications, edited by Pan, L.S. and Kania, D.R., Kluwer Academic Publishers, Boston, 1995, pp. 349–370.Google Scholar
[2] Singh, R.K. and Lee, D.-G., Journal of Electronic Materials 25, 137 (1996).Google Scholar
[3] Bögli, U., Blatter, A., Pimenov, S.M., Smolin, A.A., and Konov, V.I., Diamond Relat. Mater. 1, 782 (1991).Google Scholar
[4] Ravi, K.V. and Zarifis, V.G., in Diamond Materials, edited by Dismukes, J.P. and Ravi, K.V., Co-Editors: Spear, K.E., Lux, B., Setaka, N. (The Electrochemical Society, Proceedings Volume 93–17, Pennington, N.J., USA, 1993), pp. 861–867.Google Scholar
[5] Pimenov, S. M., Konov, V. I., Obraztsova, E. D., Bögli, U., Tosin, P., and Loubnin, E. N., Diamond Films and Technology 7, 61 (1997).Google Scholar
[6] Hirata, A., Tokura, H., and Yoshikawa, M., in Applications of Diamond Films and Related Materials, edited by: Tzeng, Y., Yoshikawa, M., Murakawa, M., Feldman, A., Elsevier Science Publishers B.V., Amsterdam, The Netherlands, 1991, pp. 227–232.Google Scholar
[7] Mori, Y. and Yoshikawa, M., Diamond Films and Technology 6, 1 (1996).Google Scholar
[8] Ralchenko, V.G. and Pimenov, S.M., Diamond Films and Technology 7, 15 (1997).Google Scholar
[9] Ralchenko, V.G., Pimenov, S.M., Kononenko, T.V., Korotushenko, K.G., Smolin, A.A., Obraztsova, E.D., and Konov, V.I., in Proc. 3rd Int. Conf. on Application of Diamond Films and Related Materials, edited by Feldman, A., Tzeng, Y., Yarbrough, W.A., Yoshikawa, M., and Murakawa, M. (NIST Spec. Publ. 885, Washington D.C., 1995), p. 255.Google Scholar
[10] Ozkan, A. M., Malshe, A. P., Brown, W. D., Diamond Relat. Mater. 6, 1789 (1997).Google Scholar
[11] Ascarelli, P., Cappelli, E., Mattei, G., Pinzari, F., and Martelli, S., Diamond Relat. Mater. 4, 464 (1995).Google Scholar
[12] Ascarelli, P., Cappelli, E., Orlando, S., Pinzari, F., presented at ALT'97, (Sept.1997) Limoges, France, SPIE Proceedings (in press)Google Scholar
[13] Gloor, S., Pimenov, S. M., Obratzova, E. D., Luthy, W., and Weber, H. P., presented at Diamond '97, (Aug. 1997), Edimburg, Scotland, U.K., Diamond Relat. Mat. (in press)Google Scholar
[14] Rothschild, M., Amone, C., and Ehrlich, D. J., J. Vac. Sci. Technol. B 4, 310 (1986).Google Scholar
[15] Ascarelli, P., Cappelli, E., Orlando, S., Pinzari, F., presented at COLA'97, Monterey, CA, Appl. Surf. Sci. (in press) (1998).Google Scholar
[16] Yoshikawa, M., Diamond Films and Technology 1, 1 (1991).Google Scholar
[17] Pimenov, S. M., Smolin, A.A., Ralchenko, V.G., and Konov, V. I., Diamond Films and Technology 2, 201 (1993).Google Scholar
[18] Pimenov, S. M., Smolin, A.A., Ralchenko, V.G., Konov, V. I., Likhanski, S. V., Veselovski, I. A., Sokolina, G. A., Bantsekov, S. V., and Spitsyn, B. V., Diamond Relat. Mater. 2, 291 (1993).Google Scholar
[19] Tokarev, V. N., Wilson, J. I. B., Jubber, M. G., John, P., and Milne, D. K., Diamond Relat. Mater. 4, 169 (1995).Google Scholar
[20] Bloenbergen, N., in Beam-Solid Interactions and Phase Transformations, edited by Kurz, H., Olson, G.L., and Poate, J.M. (Mat. Res. Soc. Proc. 51, Pittsburgh, PA, 1986), p. 3–13.Google Scholar
[21] Duley, W.W., UV Lasers: effects and applications in materials science, Cambridge University Press, Cambridge, 1996, pp.49–50.Google Scholar
[22] Nishitani-Gamo, M., Ando, T., Watanabe, K., Sekita, M., Dennig, P. A., Yamamoto, K., Sato, Y., Diamond Relat. Mater. 6, 1036 (1997).Google Scholar