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Modification of Deposition Process of Piezoelectric Polycrystalline Film by Hydrothermal Method -Improvement of the Deposition Process by Pre-Treatment Using Hydrogen Peroxide

Published online by Cambridge University Press:  01 February 2011

Akito Endo ,
Norimichi Kawashima ,
Shinichi Takeuchi ,
Mutsuo Ishikawa  and
Minoru Kurosawa
Akito Endo
Affiliation:
Toin University of Yokohama, Department of Biomedical Engineering, 1614 Kurogane-cho, Aoba-ku, Yokohama, Kanagawa, 225-8502, JAPAN
Norimichi Kawashima
Affiliation:
Toin University of Yokohama, Department of Biomedical Engineering, 1614 Kurogane-cho, Aoba-ku, Yokohama, Kanagawa, 225-8502, JAPAN
Shinichi Takeuchi
Affiliation:
Toin University of Yokohama, Department of Biomedical Engineering, 1614 Kurogane-cho, Aoba-ku, Yokohama, Kanagawa, 225-8502, JAPAN
Mutsuo Ishikawa
Affiliation:
Tokyo Institute of Tecnology, 4259 Nagatuta-machi, Midori-ku, Yokohama 226-8503, Japan
Minoru Kurosawa
Affiliation:
Tokyo Institute of Tecnology, 4259 Nagatuta-machi, Midori-ku, Yokohama 226-8503, Japan
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Abstract

We have studied on hydro-thermally synthesis of Pb(Ti, Zr)O3(PZT)piezoelectric polycrystalline thick film on titanium (Ti) substrate. The purpose of this study is resolving the problems for application of PZT hydrothermal polycrystalline thick film to the ultra miniature high frequency medical ultrasound array probe. The problems were the existence of pinholes in the deposited PZT film, the rough surface of that, low dielectric breakdown electric field etc. The surface of Ti substrate was pretreated to have hydrophilic property by using high reactivity of hydrogen peroxide for resolving the problems in this study. As results, hydrophilic property on the surface of Ti substrate was improved. Surface of PZT hydrothermal polycrystalline thick film without pinholes and smooth surface of that were obtained. Furthermore, the material properties like density, Young's modulus and piezoelectric constant d31 were increased by the pretreatment of Ti substrate. Consequently, dielectric breakdown electric field of PZT hydrothermal polycrystalline film was improved.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 872: Symposium J – Micro- and Nanosystems—Materials and Devices , 2005 , J1.3
Copyright
Copyright © Materials Research Society 2005

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References

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