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Modification of Carbon Related Films with Energy Beams

Published online by Cambridge University Press:  17 March 2011

Hiroshi Naramoto ,
Yonghua Xu ,
Kazumasa Narumi ,
Xiaodong Zhu ,
Jiri Vacik ,
Shunya Yamamoto  and
Kiyoshi Miyashita
Hiroshi Naramoto
Affiliation:
Advanced Science Research Center, Japan Atomic Energy Research Institute, 1233 Watanuki, Takasaki, Gunma 370-1292, Japan
Yonghua Xu
Affiliation:
Advanced Science Research Center, Japan Atomic Energy Research Institute, 1233 Watanuki, Takasaki, Gunma 370-1292, Japan On leave from Japan Science and Technology Corp., Kawaguchi, Saitama 332-111, Japan
Kazumasa Narumi
Affiliation:
Advanced Science Research Center, Japan Atomic Energy Research Institute, 1233 Watanuki, Takasaki, Gunma 370-1292, Japan On leave from Nuclear Physics Institute, CZ - 250 60 Rez, Czech Republic
Xiaodong Zhu
Affiliation:
Advanced Science Research Center, Japan Atomic Energy Research Institute, 1233 Watanuki, Takasaki, Gunma 370-1292, Japan
Jiri Vacik
Affiliation:
Advanced Science Research Center, Japan Atomic Energy Research Institute, 1233 Watanuki, Takasaki, Gunma 370-1292, Japan On leave from University of Science& Technology of China, Anhui 230027, P.R.China
Shunya Yamamoto
Affiliation:
Department of Materials Development, Japan Atomic Energy Research Institute, 1233 Watanuki, Takasaki, Gunma 370-1292, Japan
Kiyoshi Miyashita
Affiliation:
Gunma Prefecture Industrial Technology Research Laboratory, 190 Toriba Maebashi, Gunma 371-0845, Japan
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Abstract

We report on typical examples of thin carbon films prepared employing energy beam techniques such as ion beam deposition, ion beam assisted deposition and Laser illumination. In an annealing study of ion beam deposited carbon films, small dots with sub-micron size are isolated through the selective oxidation of sp3-bonded amorphous carbon films, and they were confirmed to be diamond nano-particles by micro-Raman spectrometry. C60 deposition assisted with Ne ion beam results in two kinds of films: 1) The quality of C60 films is improved by the assist of 500eV Ne ion bombardment. 2) The increase of Ne ion Energy results in the decomposition of C60 and the films obtained at 700°C contain possible nano-diamond crystallites at the center of the intense beam spot. The Laser illumination decomposes C60 molecules in general, but the fine-tuning of Laser energy density makes it possible to prepare an array of high luminescent spots.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 647: Symposium O – Ion Beam Synthesis & Processing of Advanced Materials , 2000 , O5.18
Copyright
Copyright © Materials Research Society 2001

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