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Modeling and Simulation of a High Frequency MEMS-Fabricated Ultrasonic Nozzle

Published online by Cambridge University Press:  01 February 2011

S. C. Tsai ,
T.K. Tseng ,
Y. L. Song ,
Y. F. Chou ,
C. S. Tsai  and
P.Z. Chang
S. C. Tsai
Affiliation:
Dept. of Chemical Engineering, California State Univ., Long Beach, CA
T.K. Tseng
Affiliation:
Institute of Applied Science and Engineering Research, Academia Sinica, Taipei, Taiwan
Y. L. Song
Affiliation:
Institute of Applied Science and Engineering Research, Academia Sinica, Taipei, Taiwan
Y. F. Chou
Affiliation:
Dept of Mechanical Engineering, National Taiwan University, Taipei, Taiwan
C. S. Tsai
Affiliation:
Institute of Applied Science and Engineering Research, Academia Sinica, Taipei, Taiwan Dept. of Electrical and Computer Engineering, Univ. of California, Irvine, CA
P.Z. Chang
Affiliation:
Institute of Applied Mechanics, National Taiwan University, Taipei, Taiwan
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Abstract

This paper reports on the design and simulation of micro-fabricated 0.5 MHz Si-based ultrasonic nozzles that consist of multiple sections of Fourier horns of half wavelength design. Such high frequency ultrasonic nozzles should produce 10-15μm-diameter uniform precursor drops for nanoparticle synthesis by means of spray pyrolysis at ambient pressure. Results of 3-D simulation using a commercial FEM program, ANSYS, show existence of one resonant frequency of pure longitudinal vibration, which is very close to the design value. The results also show that at this resonant frequency increase in vibration amplitude at the nozzle tip is very close to the theoretical values of 2n, where n is the number of horn section. Therefore, the required electric drive power should be drastically reduced and the transducer failure in ultrasonic atomization can be more readily avoided.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 729: Symposium U – MEMS and BioMEMS , 2002 , U5.3
Copyright
Copyright © Materials Research Society 2002

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References

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