Published online by Cambridge University Press: 26 February 2011
This paper presents an analytical model for the application of capacitance DLTS on the normally-on HEMT structure. Based on the charge conservation law, the DLTS signal is derived by taking into account both the Schottky gate and the heterojunction depletion layer capacitances. It is shown that the anomalous features observed by using the conventional DLTS technique on a HEMT structure can be reasonably explained with this model. Some results obtained by simulation of typical measurements are presented, which confirm our conclusions.