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Microstructure of Pulsed-Laser Deposited Pzt on Polished and Annealed Mgo Substrates

Published online by Cambridge University Press:  10 February 2011

Simon L. King ,
Luigi G. Coccia ,
J.G.E. Gardeniers  and
Ian W. Boyd
Simon L. King
Affiliation:
Dept. Electronics and Electrical Engineering, University College London, Torrington Place, London WC1E 7JE, UK.
Luigi G. Coccia
Affiliation:
Dept. Electronics and Electrical Engineering, University College London, Torrington Place, London WC1E 7JE, UK.
J.G.E. Gardeniers
Affiliation:
MESA Research Institute, Dept. Electrical Engineering, Universiteit Twente, P.O. Box 217, 7500 AE Enschede, Holland.
Ian W. Boyd
Affiliation:
Dept. Electronics and Electrical Engineering, University College London, Torrington Place, London WC1E 7JE, UK.
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Abstract

Thin films of Lead-Zirconate-Titanate (PZT) have been grown by pulsed-laserdeposition (PLD) onto polished MgO substrates both with and without pre-annealing.

The surface morphology of polished MgO substrates, which are widely used for deposition, is examined by AFM. Commercially available, mechanically-polished substrates are shown to be microscopically very rough and seem unlikely to present a surface suitable for the growth of the highest quality thin films. Annealed MgO substrates, on the other hand, comprise atomically flat terraces. The use of annealed substrates is found to enhance considerably the crystalline quality of PZT films deposited thereon.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 433: Symposium T – Ferroelectric Thin Films V , 1996 , 157
Copyright
Copyright © Materials Research Society 1996

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