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Micro-Structural and Field Emission Characteristics of Nitrogen-Doped And Micro-Patterned Diamond-Like Carbon Films Prepared by Pulsed Laser Deposition

Published online by Cambridge University Press:  14 March 2011

Ik Ho Shin ,
Jae Hyoung Choi ,
Jeong Yong Lee  and
Taek Dong Lee
Ik Ho Shin
Affiliation:
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, 373-1 Kusong-dong, Yusong-gu, Taejon 305-701, Korea
Jae Hyoung Choi
Affiliation:
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, 373-1 Kusong-dong, Yusong-gu, Taejon 305-701, Korea
Jeong Yong Lee
Affiliation:
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, 373-1 Kusong-dong, Yusong-gu, Taejon 305-701, Korea
Taek Dong Lee
Affiliation:
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, 373-1 Kusong-dong, Yusong-gu, Taejon 305-701, Korea
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Abstract

Effect of nitrogen doping on field emission characteristics of patterned Diamond-like Carbon (DLC) films was studied. The patterned DLC films were fabricated by the method reported previously[1]. Nitrogen-doping in DLC film was carried out by introducing N2 gas into the vacuum chamber during deposition. Higher emission current density of 0.3∼0.4 mA/cm2 was observed for the films with 6 at % N than the undoped films but the emission current density decreased with further increase of N contents. Some changes in CN bonding characteristics with increasing N contents were observed. The CN bonding characteristics which seem to affect the electron emission properties of these films were studied by Raman spectroscopy, x-ray photoemission spectroscopy (XPS) and Fourier transform infrared spectroscopy (FT-IR). The electrical resistivity and the optical band gap measurements showed consistence with the above analyses. High-resolution transmission electron microscopic (HRTEM) results also support the formation of graphite-like phase in 9 at % N-doped DLC film.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 621: Symposia Q/R – Electron-Emissive Materials, Vacuum Microelectronics… , 2000 , R5.7.1
Copyright
Copyright © Materials Research Society 2000

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References

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