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Micro-patterned NiFeMo Magnetoimpedance Multilayer for Magnetic Sensor Application

Published online by Cambridge University Press:  26 February 2011

Duhyun Lee ,
G.H. Jeong ,
J.H. Kim ,
Y.S. Kim  and
S.J. Suh
Duhyun Lee
Affiliation:
[email protected], Sungkyunkwan University, Dep. of Advanced Materials Engineering, 300, Chunchun-dong, Suwon, Gyonggi, 440-746, Korea, Republic of, +82-31-290-7373, +82-31-290-5644
G.H. Jeong
Affiliation:
[email protected], Sungkyunkwan University, Dept. of Advanced Materials Engineering, Korea, Republic of
J.H. Kim
Affiliation:
[email protected], Sungkyunkwan University, Dept. of Advanced Materials Engineering, Korea, Republic of
Y.S. Kim
Affiliation:
[email protected], Sungkyunkwan University, Dept. of Advanced Materials Engineering
S.J. Suh
Affiliation:
[email protected], Sungkyunkwan University, Dept. of Advanced Materials Engineering
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Abstract

As an alternative to the magnetoimpedance (MI) devices made from amorphous ribbon or wire, this study proposed a thin film type MI device composed with Ag conductive core and soft ferromagnetic NiFeMo sandwich layers. Obtained optimum sandwich structure was Ta 5 nm/ NiFeMo 300 nm/ Ta 5 nm/ Ag 900 nm/ Ta 5 nm/ NiFeMo 300 nm/ Ta 5 nm, and the width of Ag as 20 µm and the width of NiFeMo as 100 µm. It was patterned by using photolithography and lift-off process. The sandwich structure showed the maximum MI ratio about 40% at the 15 MHz. The impedance change was linear and nearly reversible at the external magnetic field region below the anisotropy field.

Keywords

magnetic propertiessensorfilm
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 906: Symposium HH – Magnetic Sensors and Sensing Systems , 2005 , 0906-HH01-09
Copyright
Copyright © Materials Research Society 2006

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