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Micron Sized Arm Using Reversible TiNi Alloy Thin Film Actuators

Published online by Cambridge University Press:  15 February 2011

Katutoshi Kuribayashi ,
Takao Taniguchi ,
Masaaki Yositake  and
Sooichi Ogawa
Katutoshi Kuribayashi
Affiliation:
Faculty of Engineering, University of Yamaguchi, Tokiwadai, Ube, Yamaguchi. 755Japan
Takao Taniguchi
Affiliation:
Faculty of Engineering, University of Yamaguchi, Tokiwadai, Ube, Yamaguchi. 755Japan
Masaaki Yositake
Affiliation:
Osaka Prefectural Research Institute, Econojima, Nishiku, Osaka, 550Japan
Sooichi Ogawa
Affiliation:
Osaka Prefectural Research Institute, Econojima, Nishiku, Osaka, 550Japan
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Abstract

Reversible TiNi (= RTiNi) alloy thin film actuator has many advantages for micro sized robot. That is. a micro arm could be fabricated easily on silicon wafer because RTiNi alloy thin film has 3 functions. 1) a frame of the arm, 2) a joint of the arm and 3) an actuator of the arm. and moreover, this film could actuates the arm without friction. A micron sized flexible arm using RTiNi alloy thin film was designed on silicon wafer. IC process for fabricating this arm on silicon wafer was designed. The fabricating process for this arm and its heat treatment process for the RTiNi are presented.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 276: Symposia U/Y – Smart Materials Fabrication and Materials for Micro-Electro-Mechanical Systems , 1992 , 167
Copyright
Copyright © Materials Research Society 1992

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References

REFERENCES

[1] Kuribayashi, K..A New Actuator of Joint Mechanism Using TiNi Alloy Wire. The Int. J. of Robotics Research. Vol.4, pp.47–58(1986).CrossRefGoogle Scholar
[2] Kuribayeshi, K.. A Millimeter Sized Robot Using SMA and Its Control. The Proc. of IEEE Industrial Workshop on Advanced Motion Control(Yokohama. JAPAN. 1990). pp. 212–218.Google Scholar
[3] Murakami, Y.. Shape Memory Alloys and Their Usage, (The Nikkan Kogyo Shinbun Ltd..JAPAN. 1987).pp. 7–13.Google Scholar
[4] Kuribayashi, K., Micro Actuator Using Shape Memory Alloy for Micro Robot. The Proc. of JSME Int. Conf. on Advanced Mechatoronics (Tokyo. JAPAN. 1989). pp. 109–114.Google Scholar
[5] Paul, R. P., Robot Manipulator. (MIT Press. 1981).Google Scholar
[6] Busch, J. D., Johnson, A. D.. Hodgson, D. E.. Lee, C. H.. and Stevenson, D. A.. Development of Shape Memory Properties in Sputter Deposited Films of Nickel Titanium Alloy, Int. Conf. on Martensitic Transformations( Australia, 1989).Google Scholar