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Micromolding of Pb and Zn with Surface Engineered LiGA Mold Inserts

Published online by Cambridge University Press:  11 February 2011

D. M. Cao ,
D. J. Guidry ,
W. J. Meng  and
K. W. Kelly
D. M. Cao
Affiliation:
Mechanical Engineering Department, Louisiana State University, Baton Rouge, LA, 70803, U.S.A.
D. J. Guidry
Affiliation:
Mezzo Systems Inc., LBTC, South Stadium Drive, Baton Rouge, LA, 70803, U.S.A.
W. J. Meng
Affiliation:
Mechanical Engineering Department, Louisiana State University, Baton Rouge, LA, 70803, U.S.A.
K. W. Kelly
Affiliation:
Mechanical Engineering Department, Louisiana State University, Baton Rouge, LA, 70803, U.S.A. Mezzo Systems Inc., LBTC, South Stadium Drive, Baton Rouge, LA, 70803, U.S.A.
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Abstract

Molding of Pb and Zn metal plates with LiGA (Lithographie, Galvanoformung, Abformung) fabricated Ni micro-scale mold inserts was carried out with as fabricated Ni inserts and Ni inserts conformally coated with Ti-containing hydrocarbon (Ti-C:H) coatings. The molding performance was characterized using scanning electron microscopy (SEM) and energy-dispersive spectroscopy (EDS), in terms of the generated features on the metal plates as well as the inserts condition after molding. The present results demonstrate that, in cases where significant metal/insert chemical interactions exist, surface modification of the mold insert is necessary to obtain satisfactory performance. Furthermore, conformal deposition of suitable engineered ceramic coatings onto Ni micro-scale mold inserts is effective for high temperature micromolding of reactive metals.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 741: Symposium J – Nano- and Microelectromechanical Systems (NEMS and MEMS) and Molecular Machines , 2002 , J10.5
Copyright
Copyright © Materials Research Society 2003

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References

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