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Micromechanical Behaviour of Amorphous Hydrogenated Silicon Carbide Films

Published online by Cambridge University Press:  15 February 2011

J. Meneve ,
R. Jacobs ,
F. Lostak ,
L. Eersels ,
E. Dekempeneer  and
J. Smeets
J. Meneve
Affiliation:
Materials Division, Vlaamse Instelling voor Technologisch Onderzoek (VITO), Boeretang 200, B-2400 Mol (Belgium)
R. Jacobs
Affiliation:
Materials Division, Vlaamse Instelling voor Technologisch Onderzoek (VITO), Boeretang 200, B-2400 Mol (Belgium)
F. Lostak
Affiliation:
Materials Division, Vlaamse Instelling voor Technologisch Onderzoek (VITO), Boeretang 200, B-2400 Mol (Belgium)
L. Eersels
Affiliation:
Materials Division, Vlaamse Instelling voor Technologisch Onderzoek (VITO), Boeretang 200, B-2400 Mol (Belgium)
E. Dekempeneer
Affiliation:
Materials Division, Vlaamse Instelling voor Technologisch Onderzoek (VITO), Boeretang 200, B-2400 Mol (Belgium)
J. Smeets
Affiliation:
Materials Division, Vlaamse Instelling voor Technologisch Onderzoek (VITO), Boeretang 200, B-2400 Mol (Belgium)
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Abstract

Amorphous hydrogenated silicon carbide (a-Si1-xCx:H) films (x = 0.65 to 1) were deposited by radio frequency plasma assisted chemical vapour deposition (RF-PACVD). Their friction and wear properties were investigated by means of a conventional ball-on-disk apparatus. The results were correlated with film mechanical properties. It was found that adding silicon to a-C:H (also called diamond-like carbon (DLC)) films reduces the hardness, elastic modulus and internal stress values by 15 to 30 %. Scratch testing induces film spallation from stainless steel substrates at low loads (1 N). In the low normal load (1 N) ball-on-disk tests under humid N2 conditions, a-Si1-xCx:H films (0.7 < x < 0.9) combine a very low wear rate of both the film and the counterbody with a steady state low friction coefficient below 0.1. For higher loads (5 and 10 N), however, this low friction coefficient only lasts for a relatively short time. In this case, the harder diamond-like carbon films perform tribologically better because of their higher wear resistance, low wear rate of the counterbody and generally low friction coefficients between 0.15 and 0.35 in a humid ambient atmosphere. In a dry N2 atmosphere, pure DLC films perform tribologically better than a-S1-xCx:H films in all respects.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 308: Symposium M1 – Thin Films: Stresses and Mechanical Properties IV , 1993 , 671
Copyright
Copyright © Materials Research Society 1993

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References

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