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Micromachined Active Piezoelectric Structures for Applications above 600 °C

Published online by Cambridge University Press:  31 January 2011

Jan Sauerwald ,
Denny Richter ,
Holger Fritze ,
Erik Ansorge  and
Bertram Schmidt
Jan Sauerwald
Affiliation:
[email protected], Clausthal University of Technology, Department of Natural and Materials Sciences, Goslar, Germany
Denny Richter
Affiliation:
[email protected], Clausthal University of Technology, Department of Natural and Materials Sciences, Goslar, Germany
Holger Fritze
Affiliation:
[email protected], Clausthal University of Technology, Department of Natural and Materials Sciences, Goslar, Germany
Erik Ansorge
Affiliation:
[email protected], Otto-von-Guericke University Magdeburg, Institute of Micro and Sensor Systems, Magdeburg, Germany
Bertram Schmidt
Affiliation:
[email protected], Otto-von-Guericke University Magdeburg, Institute of Micro and Sensor Systems, Magdeburg, Germany
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Abstract

Miniaturized monolithic langasite structures are micromachined using local doping of lan-gasite and wet chemical etching. The diffusion coefficients of niobium, strontium and praseodymium in langasite are determined in order to control the preparation process and to obtain information about the stability of locally doped structures at elevated temperatures. A wet etching process based on phosphoric acid for langasite is developed and used to manufacture microstructured elements like planar and biconvex membranes as well as field emitter diodes. These elements are characterized with respect to their application relevant properties such as resonator quality factor and field emission current at temperatures of 600 °C and above.

Keywords

microelectro-mechanical (MEMS)piezoelectricdiffusion
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1222: Symposium DD – Microelectromechanical Systems — Materials and Devices III , 2009 , 1222-DD01-07
Copyright
Copyright © Materials Research Society 2010

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