Hostname: page-component-586b7cd67f-rdxmf Total loading time: 0 Render date: 2024-11-29T07:31:29.981Z Has data issue: false hasContentIssue false
  • English
  • Français

Microcrystalline Silicon Thin-Film Solar Cells Prepared at Low Temperature

Published online by Cambridge University Press:  17 March 2011

Y. Nasuno ,
M. Kondo  and
A. Matsuda
Y. Nasuno
Affiliation:
National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan
M. Kondo
Affiliation:
National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan
A. Matsuda
Affiliation:
National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan
Get access

Abstract

Hydrogenated microcrystalline silicon (µc-Si:H) p-i-n solar cells have been prepared using a conventional RF plasma-enhanced chemical vapor deposition (PECVD) method at a low process temperature of 140 °C. The low temperature deposition of µc-Si:H has been found to be effective to suppress the formation of oxygen-related donors that cause a reduction in open circuit voltage (Voc) due to shunt leakage. We demonstrate the improvement of Voc by lowering the deposition temperature down to 140, while suppressing the reduction in high short circuit current density (Jsc) and fill factor (FF). A high efficiency of 8.9% was obtained using an Aasahi-U substrate. Furthermore, by optimizing textured structures on ZnO transparent conductive oxide (TCO) substrates, an efficiency of 9.4% (Voc=0.526V, Jsc=25.3mA/cm2, FF=0.710) was obtained. In addition, relatively high efficiency of 8.1% was achieved using VHF (60MHz) plasma at a deposition rate of 12 Å/s. Thus, this low temperature deposition technique for µc-Si:H is promising for both high efficiency and high rate deposition of µc-Si:H solar cells.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 664: Symposium A – Amorphous and Heterogeneous Silicon-Based Films-2001 , 2001 , A15.5
Copyright
Copyright © Materials Research Society 2001

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

[1] Yamamoto, K., Yoshimi, M., Tawada, Y., Okamoto, Y. and Nakajima, A., J. of Non-crystalline Solids 266–269, (2000) 1082.Google Scholar
[2] Saito, K., Sano, M., Matzuda, K., Kondo, T., Higasikawa, M. and Kariya, T., in Proceedings of 11th PVSEC (PVSEC, Hokkaido, 1999) 229.Google Scholar
[3] Keppner, H., Meier, J., Torres, P., Fischer, D., and Shah, A., Applied physics A 69, (1999) 169.Google Scholar
[4] Vetterl, O., Finger, F., Carius, R., Hapke, P., Houben, L., Kluth, O., Lambertz, A., Muck, A., Rech, B. and Wagner, H., Solar Energy Materials and Solar cells 62, (2000) 97.10.1016/S0927-0248(99)00140-3Google Scholar
[5] Bergmann, R.B., Applied physics A 69, (1999) 187.Google Scholar
[6] Kluth, O., Rech, B., Houben, L., Wieder, S., Schope, G., Beneking, C., Wagner, H., Loffl, A. and Schock, H. W.: Thin Solids Films 351 (1999) 247.Google Scholar
[7] Sakai, H., Yoshida, T., Hama, T. and Ichikawa, Y.: Jpn. J. Appl. Phys. Vol.29 No.4 (1990) 630.Google Scholar
[8] Yamamoto, H., Isomura, M., Kondo, M. and Matsuda, A.: in Proceedings of 11th PVSEC (PVSEC, Hokkaido, 1999) 231.Google Scholar
[9] Rech, B., Kluth, O., Wieder, S., Siekmann, H., Muller, J., Reetz, W., O.Vetterl, Lundszien, D., Lambertz, A., Finger, F. and Wagner, H., in Proceedings of 11th PVSEC (PVSEC, Hokkaido, 1999) 67.Google Scholar
[10] Guo, L., Kondo, M., Fukawa, M., Saito, K. and Matsuda, A., Jpn. J. Appl. Phys. 37, (1998)Google Scholar
[11] Kamei, T., Kondo, M. and Matsuda, A., Jpn. J. Appl. Phys. 37, (1998) L265.Google Scholar
[12] Yamasaki, S., J. Phys. (Paris) 42, (1981) C4–297.Google Scholar
[13] Shimizu, T., Kidoh, H., Morimoto, A. and Kumeda, M., Jpn. J. Appl. Phys. 28, (1989) 586.Google Scholar
[14] Stavola, M., Pearton, S. J., Lopata, J., and Dautremont-Smith, W. C., Phys. Rev. B 37 (1988) 8313.Google Scholar
[15] Nasuno, Y., Kondo, M. and Matsuda, A.: to be published in Proceedings of the 28th IEEE PVSC (IEEE, Anchorage, 2000).Google Scholar
[16] Stiebig, H., Brammer, T., Zimmer, J., Vetterl, O. and Wagner, H., J. of Non-crystalline Solids 266–269, (2000) 1104.Google Scholar
[17] Taniguchi, H., Sannomiya, H., Kajiwara, K., Nomoto, K., Yamamoto, Y., Hiyoshi, K., Kumada, H., Murakami, M. and Tomita, T.: Solar Energy Materials and Solar cells 49 (1997) 101.Google Scholar
[18] Ikeo, I., Morooka, H., Shinohara, H., Takenouchi, A., Takagi, N. and Arai, A.: J. of Non-crystalline Solids 198–200 (1996) 1109.Google Scholar