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Published online by Cambridge University Press: 22 February 2011
Use of a Fourier—transform interferometer integrated with a variable incidence angle ellipsometer extends the spectral range and the capabilities of spectroscopic ellipsometry into the infrared. With a spectral range of 600 to 6600 cm—1, thick layers, such as epitaxial doped layers and polymers can be analysed.
A full description of this novel instrument will be given. Incidence angle can be variedautomatically to enhance signal/noise and the ellipsometric data can be obtained together with vibrational absorption bands information to give a characteristic “fingerprint ” of the layers.
Examples of spectra of HCN polymer on nickel, DMHS on aluminium and PMMA on silicon willbe presented for various incidence angles and layer thickness.