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Methods to Measure Mechanical Properties of NEMS and MEMS: Challenges and Pitfalls

Published online by Cambridge University Press:  31 January 2011

Ingrid De Wolf ,
Stanislaw Kalicinski ,
Jeroen De Coster  and
Herman Oprins
Ingrid De Wolf
Affiliation:
[email protected], IMEC, Leuven, Belgium
Stanislaw Kalicinski
Affiliation:
[email protected], IMEC, Leuven, Belgium
Jeroen De Coster
Affiliation:
[email protected], IMEC, Leuven, Belgium
Herman Oprins
Affiliation:
[email protected], IMEC, Leuven, Belgium
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Abstract

This paper focuses on the measurement of material properties of micro and nano-electromechanical systems. Two different methods are discussed: electrical or optical measurements of the resonance frequency, and measurements of the Raman frequency shift. The main focus of this paper is on challenges and pitfalls related to the use of these techniques for the study of MEMS and NEMS.

Keywords

microelectro-mechanical (MEMS)Raman spectroscopyoptical
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1185: Symposium II – Probing Mechanics at Nanoscale Dimensions , 2009 , 1185-II04-06
Copyright
Copyright © Materials Research Society 2009

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