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Published online by Cambridge University Press: 25 February 2011
Ni-Ti films were bombarded by plasma source heavy ions of different ion dose and ion flux. Disc-like non-uniform microstructures were found when the films were irradiated at a dose of 5x1016Kr+/cm2. These “discs” were acting as defect centers. The development of “discs” depended on the plasma ion flux during the pulse. Target geometry appeared to have effects on the density of “discs”.