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Mechanistic Study of Laser Chemical Vapor Deposition of Trimethylindium

Published online by Cambridge University Press:  25 February 2011

Masahiro Kawasaki ,
Kazuo Kasatani ,
Akihiko Sato ,
Hiroyasu Sato  and
Nobuyuki Nishi
Masahiro Kawasaki
Affiliation:
Research Institute of Applied Electricity, Hokkaido University, N2W6, Sapporo 060, Japan
Kazuo Kasatani
Affiliation:
Chemistry Department of Resources, Mi'e University, Tsu 514, Japan Research Institute of Applied Electricity, Hokkaido University, N2W6, Sapporo 060, Japan
Akihiko Sato
Affiliation:
Chemistry Department of Resources, Mi'e University, Tsu 514, Japan Research Institute of Applied Electricity, Hokkaido University, N2W6, Sapporo 060, Japan
Hiroyasu Sato
Affiliation:
Chemistry Department of Resources, Mi'e University, Tsu 514, Japan Research Institute of Applied Electricity, Hokkaido University, N2W6, Sapporo 060, Japan
Nobuyuki Nishi
Affiliation:
Institute for Molecular Science, Okazaki 444, Japan Research Institute of Applied Electricity, Hokkaido University, N2W6, Sapporo 060, Japan
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Abstract

Laser photodissociation of trimethylindium on a quartz substrate has been studied by the laser-induced fluorescence and photofragment mass-spectrometric techniques. Translational energy distributions of photofragments are measured.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 129: Symposium B – Laser and Particle-Beam Modification of Chemical Processes on Surfaces , 1988 , 69
Copyright
Copyright © Materials Research Society 1989

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References

REFERENCES

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