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Mechanism for Step Growth on Diamond (100)

Published online by Cambridge University Press:  25 February 2011

Mei Zhu ,
Robert H. Hauge ,
John L. Margrave  and
Mark P. D'Evelyn
Mei Zhu
Affiliation:
Department of Chemistry and Rice Quantum Institute, Rice University, Houston, TX 77251–1892
Robert H. Hauge
Affiliation:
Department of Chemistry and Rice Quantum Institute, Rice University, Houston, TX 77251–1892
John L. Margrave
Affiliation:
Department of Chemistry and Rice Quantum Institute, Rice University, Houston, TX 77251–1892
Mark P. D'Evelyn
Affiliation:
Department of Chemistry and Rice Quantum Institute, Rice University, Houston, TX 77251–1892
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Abstract

A model for diamond growth on stepped diamond (100)2×1 surfaces is proposed, involving adsorption and reaction of CH3 and H on a dimer-reconstructed surface. Surface rearrangments and the breaking of C-C dimer bonds by H and/or H2 are suggested to be important The energetics were estimated by molecular mechanics (MM3). Growth is concluded to occur predominantly by extension of dimer rows, yielding a smooth surface, due to steric and bond-strain constraints on the positions of precursor-addition reactions and the kinetic stability of type SB steps against etching.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 280: Symposium B – Evolution of Surface and Thin Film Microstructure , 1992 , 683
Copyright
Copyright © Materials Research Society 1993

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References

REFERENCES

Tsuno, T., Imai, T., Nishibayashi, Y., Hamada, K., and Fujimori, N., Jpn. J. Appl. Phys. 30, 1063 (1991).CrossRefGoogle Scholar
2. Busmann, H.-G., Zimmermann-Edling, W., Sprang, H., Guntherodt, H.-J., and Hertel, I. V., Dia. Rel. Mater. 1, 979 (1992).CrossRefGoogle Scholar
3. Sutcu, L. F., Chu, C. J., Thompson, M. S., Hauge, R. H., Margrave, J. L., and D'Evelyn, M. P., J. Appl. Phys. 71, 5930 (1992).Google Scholar
4. Maguire, H. G., Kamo, M., Lang, H. P., Meyer, E., Weissendanger, K., and Güntherodt, H.-J., Dia. Rel. Mater. 1, 634 (1992).Google Scholar
5. (a) Yang, Y. L. and D'Evelyn, M. P., J. Am. Chem. Soc. 114, 2796 (1992);Google Scholar
(b) Yang, Y. L. and D'Evelyn, M. P., J. Vac. Sci. Technol. A 10, 978 (1992)‥Google Scholar
6. (a) Harris, S. J., Belton, D. N., and Blint, R. J., J. Appl. Phys. 70, 2654 (1991);Google Scholar
(b) Harris, S. J. and Belton, D. N., Appl. Phys. Lett. 59, 1949 (1991);CrossRefGoogle Scholar
(c) Belton, D. N. and Harris, S. J., J. Chem. Phys. 96, 2371 (1992).CrossRefGoogle Scholar
7. We use the step notation described by Chadi, D. J., Phys. Rev. Lett. 59, 1691 (1987).CrossRefGoogle Scholar
8. Chase, M. W. Jr., Davies, C. A., Downey, J. R. Jr., Frurip, D. J., McDonald, R. A., and Syverud, A. N., JANAF Thermochemical Tables, 3rd Ed., J. Phys. Chem. Ref. Data 14, Supplement No. 1 (1985).Google Scholar
9. (a) Chu, C. J., D'Evelyn, M. P., Hauge, R. H., and Margrave, J. L., J. Mater. Res. 5, 2405 (1990); (b) J. Appl. Phys. 70, 1695 (1991);Google Scholar
(c) D'Evelyn, M. P., Chu, C. J., Hauge, R. H., and Margrave, J. L., J. Appl. Phys. 71, 1528 (1992).Google Scholar
10. (a) Martin, L. R. and Hill, M. W., J. Mater. Sci. Lett. 9, 621 (1990);Google Scholar
(b) Harris, S. J. and Martin, L. R., J. Mater. Res. 5, 2313 (1990).Google Scholar
11. Johnson, C. E., Weimer, W. A., and Cerio, F. M., J. Mater. Res. 7, 1427 (1992).Google Scholar
12. Harris, S. J., Weiner, A. M., and Perry, T. A., Appl. Phys. Lett. 53, 1605 (1988).CrossRefGoogle Scholar
13. Goodwin, D. G. and Gavillet, G. G., J. Appl. Phys. 68, 6393 (1990).Google Scholar
14. Garrison, B. J., Dawnkaski, E. J., Srivastava, D., and Brenner, D. W., Science 255, 835 (1992).Google Scholar
15. Chu, C. J., Hauge, R. H., and Margrave, J. L., unpublished results.Google Scholar
16. Thomas, R. E., Rudder, R. A., and Markunas, R. J., in Diamond Materials, ed. Purdes, A. J., Angus, J. C., Davis, R. F., Meyerson, B. M., Spear, K. E., and Yoder, M. (The Electrochemical Society, Pennington, New Jersey, 1991), p. 186.Google Scholar
17. Ravi, K. V. and Yaniv, D., Appl. Phys. Lett, (in press).Google Scholar